Conveying box cleaning chamber

Abstract

The present invention provides a transfer cartridge cleaning chamber, comprising: a cleaning chamber having an entrance door and accommodating a transferred transfer cartridge for cleaning; a drying chamber having an exit door and drying the transfer cartridge transferred from the cleaning chamber; a switch disposed between the cleaning chamber and the drying chamber for lifting; and a chamber moving unit that moves the transfer cartridge from the cleaning chamber to the drying chamber.

Description

technical field [0001] Embodiments relate to a pod of delivery (POD) cleaning chamber. More specifically, it relates to a transport box cleaning chamber that handles washing and drying in separate spaces when cleaning inner and outer transport boxes separately. Background technique [0002] Semiconductors are used in various fields along with the development of industry, and the miniaturization and technological advancement are progressing. [0003] Recently, a new semiconductor production technology suitable for an extreme ultraviolet (extreme Ultraviolet, EUV) process has attracted much attention. [0004] In the semiconductor industry, EUV refers to an important process in manufacturing semiconductors, ie, extreme ultraviolet lithography technology using a light source of extreme ultraviolet wavelength in a photolithography process or a manufacturing process using the same. [0005] In the production of semiconductor chips, silicon-based discs called wafers, ie discs co...

AI Technical Summary

Problems solved by technology

[0014] For this kind of transfer box, when cleaning, there is a big problem in the semiconductor process for the presence of impurities inside, and the importance of cleaning the transfer box is increased.

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