X-ray flat panel detector, manufacturing method thereof, detection device and imaging system
A technology of a flat panel detector and a manufacturing method, which is applied in the detection field, can solve the problems of high production cost and low resolution of X-ray flat panel detectors, and achieve the effects of improving detection performance, resolution, and filling rate
Pending Publication Date: 2022-05-20
BOE TECH GRP CO LTD
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[0005] In view of this, the application provides an X-ray flat panel detector and its manufacturing method, detection device, and imaging system, which are used to solve the problem that the filling rate of the X-ray flat panel detector in the prior art is restricted by the size of the thin film transistor and the metal wiring. Cause the problem of low resolution, and solve the problem of high production cost of the prior art X-ray flat panel detector
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[0059] Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited by the embodiments set forth herein. Rather, these embodiments are provided for more thorough understanding of the present disclosure and to fully convey the scope of the present disclosure to those skilled in the art.
[0060] Those skilled in the art will understand that unless otherwise stated, the singular forms "a", "an", "said" and "the" used herein may also include plural forms. It should be further understood that the word "comprising" used in the specification of the present application refers to the presence of the features, integers, steps, operations, elements and / or components, but does not exclude the presence or addition of one or mor...
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The invention provides an X-ray flat panel detector, a manufacturing method thereof, a detection device and an imaging system. The X-ray flat panel detector comprises: a substrate; the backboard layer is located on the substrate and comprises a plurality of thin film transistors, and each thin film transistor comprises a source drain electrode layer. The wiring layer is located on the side, away from the substrate, of the backboard layer and comprises a plurality of connecting lines. The photosensitive device layer is located on the side, away from the substrate, of the wiring layer and comprises a plurality of first electrodes, each first electrode is connected with a source drain electrode layer of a thin film transistor through a connecting line, and the orthographic projection of the photosensitive device layer on the substrate is not overlapped with the orthographic projection of the backboard layer on the substrate. According to the invention, the filling rate of the X-ray flat panel detector can be improved, so that the resolution and the detection performance of the X-ray flat panel detector can be improved; in addition, the arrangement of the connecting lines can further improve the resolution of the X-ray flat panel detector, and can realize the compatibility of the backboard layer and the photosensitive device layers with different sizes, thereby reducing the production cost.
Description
technical field [0001] The present application relates to the field of detection technology, specifically an X-ray flat panel detector, a manufacturing method thereof, a detection device, and an imaging system. Background technique [0002] Digital Radiography (Digital Radiography, DR) is a new technology of X-ray photography developed in the 1990s. With its remarkable advantages such as faster imaging speed, more convenient operation, and higher imaging resolution, it has become a digital It is the leading direction of X-ray photography technology and has been recognized by clinical institutions and imaging experts all over the world. The technical core of DR is the flat panel detector, which is a precise and expensive device that plays a decisive role in the imaging quality. At present, flat panel detectors are mainly divided into two categories, one is indirect detection and the other is direct detection. [0003] The traditional indirect X-ray flat panel detector mainl...
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IPC IPC(8): H01L27/146
CPCH01L27/14605H01L27/14636H01L27/14663H01L27/14683H01L27/14689H10K39/36H01L27/14692H01L27/14603H01L27/14658H01L27/14612G01T1/20184H10K19/20H10K19/201
Inventor 陈江博卢尧段立业孙拓
Owner BOE TECH GRP CO LTD