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Method for judging specific layer number of graphene within ten layers according to optical microscope image

An optical microscope and layered graphene technology, which is applied in the direction of material analysis, scientific instruments, and instruments through optical means, can solve the problems of reduced accuracy, inconspicuous contrast, and complicated operation steps of the atomic force microscope, and achieve high judgment efficiency, Simple and convenient operation, simple operation effect

Pending Publication Date: 2022-05-27
XI AN JIAOTONG UNIV
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  • Application Information

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Problems solved by technology

The transmission electron microscope observes the number of graphene layers through high-resolution images of graphene edges or folds, but it is difficult to accurately judge when the contrast is not obvious, and the equipment is expensive and the operation steps are complicated
Raman spectroscopy judges the number of graphene layers by the ratio of the characteristic peak of graphene 2D peak to G peak or the shape and position of the 2D peak, but when the number of graphene layers is greater than 5 layers, the shape and intensity of the 2D peak are very similar to those of graphite. similar, indistinguishable
The atomic force microscope is the most direct and effective tool at present. The thickness of the graphene is directly measured by the scanning probe to determine the number of layers. However, when the surface of the graphene has impurities or many folds, the accuracy of the atomic force microscope will be reduced, and the equipment is expensive. , small observation range, low efficiency

Method used

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  • Method for judging specific layer number of graphene within ten layers according to optical microscope image
  • Method for judging specific layer number of graphene within ten layers according to optical microscope image
  • Method for judging specific layer number of graphene within ten layers according to optical microscope image

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Embodiment 1

[0078] The examples refer to the literature published by Chen in the journal J.Phys.Chem.C in 2011. There is 300nm SiO under the light microscope image. 2 / Si substrate, one-layer graphene, two-layer graphene, three-layer graphene and four-layer graphene samples;

[0079] Step 1, according to the theoretical formula C=0.0046+0.0925N-0.00255N 2 The theoretical contrast values ​​of graphene with different layers within 10 layers are obtained, as shown in the following table.

[0080]

[0081] Step 2, get 300nm SiO 2 The optical microscope pictures of / Si substrate and graphene with known layers under the substrate are as follows Figure 4 shown.

[0082] Step 3, use the impixel function of MATLAB software to extract several R, G, B stimulus values ​​from the light mirror image in step 2, and average them, and further obtain the corresponding relative stimulus values, taking one layer and nine layers of graphene as examples. , R, G, B stimulation values ​​and relative stim...

Embodiment 2

[0092] Embodiment is the graphene sample prepared by CVD method, matched with Raman spectrum such as Figure 8 , the ratio of the characteristic peak 2D peak to G peak is 2.99, and the FWHM of the 2D peak is 33cm. -1 , the 2D peak fits the Lorentz peak as a single, this sample is a layer of graphene. Example with 300nm SiO 2 / Si substrate, a layer of graphene like.

[0093] Step 1, according to the theoretical formula C=0.0046+0.0925N-0.00255N 2 The theoretical contrast values ​​of graphene with different layers within 10 layers were obtained.

[0094] Step 2, get 300nm SiO 2 The optical microscope pictures of / Si substrate and graphene with known layers under the substrate are as follows figure 2 shown.

[0095] Step 3, use the impixel function of MATLAB software to extract several R, G, B stimulus values ​​from the light mirror image in step 2, and average them, and further obtain the corresponding relative stimulus values.

[0096] Step 4: Establish a random chance ...

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Abstract

The invention discloses a method for judging the specific layer number of graphene within ten layers according to an optical microscope image, which comprises the following steps of: simultaneously utilizing R, G and B stimulus values in a graphene light microscope image; the optimal stimulation value weight is solved by adopting a random chance constraint model in consideration of different contrast weights of R, G and B stimulation values and random factors such as non-uniform light intensity possibly existing in a light microscope image shooting process or a certain error of the thickness of a specific substrate due to a preparation process, so that the accuracy of a judgment result is higher; meanwhile, the method has the advantages of being easy to operate, high in efficiency, low in equipment cost and the like, and can also be applied to layer number judgment of other substrates and other two-dimensional materials.

Description

technical field [0001] The invention relates to a method for judging the number of graphene layers under an optical microscope, in particular to a method based on a random chance constraint model and a decision tree method, using the R, G and B stimulation values ​​of graphene images under an optical microscope to determine the specific layers of graphene within 10 layers method of judging numbers. Background technique [0002] In the past 20 years, carbon nanomaterials have always been the frontier of scientific research and have become the focus of scientific research scholars. Due to their excellent electrical, thermal, and optical properties, they are widely used in optoelectronics, biomedicine, energy storage and other fields. In 2004, graphene was discovered by scholars through mechanical exfoliation, which filled the gap of carbon nanomaterials in two-dimensional space. The carbon atoms of graphene passed through SP 2 The hybrid bonds with surrounding carbon atoms to...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/84
CPCG01N21/84
Inventor 孟国栋詹涪至折俊艺谢晋安王常龄夏凌寒
Owner XI AN JIAOTONG UNIV