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A gram weight adjustment structure, a tool adjustment assembly and a splitter having the same

A technology for adjusting structure and components, applied in the direction of working accessories, electrical components, manufacturing tools, etc., can solve problems such as low yield rate, chip quality does not meet the requirements, and achieve the effect of ensuring accuracy

Active Publication Date: 2022-08-05
HEBEI KTHAHCO TECH CO LTD
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

[0003] Therefore, the technical problem to be solved by the present invention is to overcome the inaccurate force applied to the cleaving knife in the prior art, which leads to the unqualified chip quality after cracking and the low yield rate defects, thereby providing a grammage adjustment structure, knife adjustment Component and the splitter with it

Method used

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  • A gram weight adjustment structure, a tool adjustment assembly and a splitter having the same
  • A gram weight adjustment structure, a tool adjustment assembly and a splitter having the same
  • A gram weight adjustment structure, a tool adjustment assembly and a splitter having the same

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Embodiment Construction

[0032] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0033] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the accompanying drawings, which is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the indicated device or element must hav...

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Abstract

The invention relates to the technical field of wafer processing, in particular to a gram weight adjustment structure, a tool adjustment assembly and a splitter having the same. A gram weight adjustment structure, comprising: an adjustment plate, at least one shrapnel and at least one sensor are arranged on the adjustment plate, the shrapnel is vertically arranged with the adjustment plate; a controller is signally connected to the sensor; a tool support, the tool support is provided with an opening The frame body facing the adjustment plate, and the height adjustment pieces and the riving knife are respectively arranged on opposite sides of the frame body, the frame body is slidably connected with the adjustment plate, and the frame body has a first side wall and a second side wall oppositely arranged along the height direction, The shrapnel extends into the opening of the frame body, the height adjustment piece passes through the first side wall and then abuts against the shrapnel piece, and the rotation of the height adjustment piece drives the frame body to move on the adjustment plate, so that the sensor senses the contact with the second side wall of the frame body. distance, send a signal to the controller, and calculate the value of the pressure applied to the rivet. The invention solves the problem of low yield of chips after cracking caused by imprecise force applied to the riving knife.

Description

technical field [0001] The invention relates to the technical field of wafer processing, in particular to a gram weight adjustment structure, a tool adjustment assembly and a splitter having the same. Background technique [0002] The main material of the chip is gallium arsenide (GaAs), and the splitter is a device that splits the bar into individual chips. In the chip manufacturing process, the splitting force applied by the splitter to the bar should be precise and stable. In the existing splitter, the force applied to the rib is inaccurate, and at the same time, the measurement is inaccurate due to inaccuracy. Too large or too small cracking force affects the state of the rib when cracking the bar, resulting in cracking. The quality of the resulting chips does not meet the requirements, reducing the yield. SUMMARY OF THE INVENTION [0003] Therefore, the technical problem to be solved by the present invention is to overcome the defects in the prior art that the inacc...

Claims

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Application Information

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IPC IPC(8): B28D5/04B28D7/00H01L21/304H01L21/67
CPCB28D5/04B28D5/0058B28D5/0064H01L21/304H01L21/67253
Inventor 苗惠霞侯彩波张一暾温子勋张文杰马修远刘亚洲
Owner HEBEI KTHAHCO TECH CO LTD
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