High-temperature-resistant high-sensitivity gas sensor and preparation method thereof
A gas sensor and high-sensitivity technology, applied in the field of gas sensing, can solve problems such as the inability of gas detectors to work normally and reliably, achieve high critical breakdown electric field, increase the gas adsorption area, and reduce the size.
Pending Publication Date: 2022-06-21
有云信息科技(苏州)有限公司
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Problems solved by technology
In this high temperature environment, conventional gas detectors cannot work normally and reliably. The industry urgently needs a gas sensor with good high temperature resistance, high detection accuracy and sensitivity, good gas detection stability, and Long service life in high temperature environment
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Abstract
The invention belongs to the technical field of gas sensing, and particularly relates to a high-temperature-resistant high-sensitivity gas sensor and a preparation method thereof. The method comprises the following steps: extending a layer of p-type SiC on an n-type heavily doped SiC substrate; epitaxially growing a layer of n-type heavily doped SiC on the p-type SiC to form an npn sandwich structure; a triangular groove is formed in the sandwich structure; depositing a layer of oxide dielectric material in the groove; and depositing a layer of precious metal nanoparticles on the oxide dielectric material. High-temperature and high-sensitivity gas sensing detection is realized by utilizing the characteristic of high temperature resistance of a SiC material and the advantage of high specific surface area of precious metal nanoparticles.
Description
Technical field [0001] The invention is a gas sensing technology field, which involves a gas sensor and its preparation method. Background technique [0002] Most of the current commercial gas detectors work within the temperature range of -40 degrees to 70 degrees.However, many industrial applications, such as metallurgical industry, thermal power plants, and oil exploration, have many high -temperature work areas, and generally work temperature can be as high as about 150 degrees.In this high temperature environment, conventional gas detectors cannot work normally and reliably. The industrial world urgently needs a gas sensor to have good high temperature resistance, high detection accuracy and sensitivity, good gas detection stability, and with good gas detection stability.It has a long service life in high temperature environments. Invention content [0003] The purpose of the present invention is to provide a high -temperature and high sensitivity gas sensor and its prepara...
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IPC IPC(8): G01N27/00H01L29/423H01L21/336H01L29/78
CPCG01N27/00H01L29/4236H01L29/66068H01L29/78
Inventor 仇志军杨强强贺瑞坡
Owner 有云信息科技(苏州)有限公司
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