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73results about How to "High breakdown electric field" patented technology

Deep ultraviolet APD detection diode based on Ir2O3/Ga2O3 and manufacturing method thereof

The invention relates to a deep ultraviolet APD detection diode based on Ir2O3/Ga2O3 and a manufacturing method thereof. The method comprises the following steps of selecting a beta-Ga2O3 substrate; growing a beta-Ga2O3 material on a beta-Ga2O3 substrate surface to form a homogeneous epitaxial layer; growing an Ir2O3 material on a homogeneous epitaxial layer surface so as to form a heterogeneous epitaxial layer; etching the heterogeneous epitaxial layer and the homogeneous epitaxial layer to form a trapezoidal structure; forming a top electrode on a heterogeneous epitaxial layer surface; and forming a bottom electrode on a lower surface of the beta-Ga2O3 substrate and finally forming an APD detector diode. In the invention, the beta-Ga2O3 material is used, a super high light penetration rate and transparency of the material in a deep ultraviolet area and a visible light area are performed, super high voltage withstanding performance of an APD detector and a high breakdown electric field are ensured; the diode is suitable for extreme environments of a high frequency, high radiation, high temperature and high voltage and the like; under the extreme environments, device reliability can be greatly increased and detection performance is better than that of an existing APD detector.
Owner:XIDIAN UNIV

SOI-LIGBT device capable of suppressing Snapback phenomenon and manufacturing method thereof

The invention provides an SOI-LIGBT device capable of suppressing a Snapback phenomenon and a manufacturing method thereof. The cellular structure of the SOI-LIGBT device comprises a substrate, a buried oxygen layer, a thick dielectric layer, a thick silicon layer drift region, a P well region, a P-type heavily doped emitter region, a first N-type heavily doped region, a N-type buffer region, a P-type heavily doped collector region, a second N-type heavily doped region, a collector dielectric barrier layer, a collector contact electrode, a ultrathin top layer silicon drift region, a P emitter contact electrode, a gate oxide layer, a polysilicon gate, P strips, and N strips. The N strips and the P strips are alternately arranged in the thick silicon layer drift region in the Z direction. The ultrathin top layer silicon drift region enhances the buried layer electric field to improve the longitudinal breakdown voltage of the SOI device. The thick silicon layer drift region reduces the specific on-resistance of the device. Lateral linear variable doping is performed on the ultrathin top layer silicon drift region and the thick silicon layer drift region to adjust the surface electric field distribution so that the specific on-resistance is greatly reduced while the high breakdown voltage of the device is maintained.
Owner:UNIV OF ELECTRONIC SCI & TECH OF CHINA +1

Etching-based one-dimensional electron gas GaN-based HEMT (high electron mobility transistor) device and preparation method thereof

The invention discloses an etching-based one-dimensional electron gas GaN-based HEMT (high electron mobility transistor) device and preparation method thereof, and mainly solves the problems that the conventional one-dimensional electron gas device has low high-temperature and high-pressure characteristics, frequency characteristics and power characteristics. The device comprises a substrate, a buffering layer, a potential barrier layer, a passivation layer and a protection layer from top to bottom; the two ends of the potential barrier layer are respectively a source and a drain; the passivation layer is positioned on the potential barrier layer between the source and the drain; a gate groove is formed in the passivation layer; and a gate is arranged in the gate groove. A plurality of quantum wire grooves which are arranged uniformly are etched on the potential barrier layer so as to obtain a plurality of quantum wire bosses with the width of nanoscale; and one-dimensional electron gas is formed in heterogenous junctions of the quantum wire bosses. The buffering layer adopts GaN; and the potential barrier layer adopts AlGaN. Compared with a Si-based device and a GaAs-based device, the etching-based one-dimensional electron gas GaN-based HEMT device has high high-temperature and high-pressure characteristics, frequency characteristics and power characteristics, and can be used for manufacturing ultrahigh speed low-power consumption one-dimensional electron gas devices.
Owner:云南凝慧电子科技有限公司

Ion-implanted one-dimensional electron gas GaN-based HEMT (high electron mobility transistor) device and preparation method

The invention discloses an ion-implanted one-dimensional electron gas GaN-based HEMT (high electron mobility transistor) device and a preparation method. The problems of poorer high-temperature high-voltage characteristics, frequency characteristics and power characteristics of the conventional one-dimensional electron gas device are mainly solved. The device comprises a substrate, buffer layer, a potential barrier layer, a passivation layer and a protective layer from bottom to top, wherein a source and a drain are arranged at two ends on the potential barrier layer respectively; the passivation layer is positioned on the potential barrier layer between the source and the drain; a gate trough is formed in the passivation layer, and a gate is arranged in the gate trough; the buffer layer is made from GaN, and the potential barrier layer is made from AlGaN; anions are implanted into local areas on the potential barrier layer, and the areas where the anions are implanted are a plurality of spaced strips; the widths of areas where the anions are not implanted between the strips are at a nanometer order of magnitude, and a one-dimensional electron gas is formed in heterogeneous junctions below the areas where the anions are implanted. Compared with Si-based and GaAs-based devices, the device has good high-temperature high-voltage characteristics, good frequency characteristics and good power characteristics, and a one-dimensional electron gas device with super-high speed and low power consumption can be manufactured.
Owner:陕西半导体先导技术中心有限公司

PDMS/SiC functional gradient substrate and preparation method and application thereof

The invention discloses a PDMS/SiC functional gradient substrate and a preparation method and an application thereof. PDMS in the substrate is a matrix material and SiC is a reinforcing phase; the SiCcontent is in gradient increasing from the outside of the substrate to the inside of the substrate, and the minimum value of SiC content on the outside of the substrate is 0-5%, the maximum value ofthe SiC content in the substrate is 45-55%, -55%, wherein the inner side of the substrate is one side used for being inserted into an electronic component and a connecting circuit. The rigidity of thesubstrate gradually increases from the outer surface to the inner surface, and the flexibility gradually decreases. Namely, the good flexibility on the outer surface of the substrate ensures that thesurface has very good conformability and stretchable/bendable characteristics to meet the requirements of actual working environment and use conditions; however, one side of the inner surface of thesubstrate has higher rigidity, so as to avoid the damage of the electronic component and the connecting circuit caused by excessive deformation when placing the electronic component and printing the connecting circuit (the excessive deformation is limited by improving rigidity constraint), and the stable electrical performance of the electronic component is ensured.
Owner:QINGDAO TECHNOLOGICAL UNIVERSITY

Secondary-growth one-dimensional electron gas GaN-based HEMT (High Electron Mobility Transistor) device and preparation method

ActiveCN103367429AImprove high temperature and high pressure characteristicsImprove featuresNanoinformaticsSemiconductor/solid-state device manufacturingHigh pressureProtection layer
The invention discloses a secondary-growth one-dimensional electron gas GaN-based HEMT (High Electron Mobility Transistor) device and a preparation method, which mainly solve the problems that the high temperature and high pressure characteristic, the frequency characteristic and the power characteristic of an existing one-dimensional electron gas device are poorer. The secondary-growth one-dimensional electron gas GaN-based HEMT device comprises a substrate, a buffer layer, a barrier layer, a passivation layer and a protection layer from bottom to top, wherein two ends of the barrier layer are respectively provided with a source electrode and a drain electrode, the passivation layer is positioned on the barrier layer between the source electrode and the drain electrode, the passivation layer is provided with a grid groove, the grid groove is internally provided with a grid electrode, the buffer layer adopts GaN, the barrier layer adopts AlGaN, the buffer layer is etched with a plurality of quantum wire grooves and quantum wire convex plates, the quantum wire grooves and the quantum wire convex plates are in periodical arrangement, the width of the quantum wire grooves and the quantum wire convex plates is in a nanometer level, and one-dimensional electron gas is formed in a heterogenous junction which is right under the quantum wire grooves and the quantum wire convex plates. Compared with a Si-based and GaAs-based one-dimensional electron gas device, the secondary-growth one-dimensional electron gas GaN-based HEMT device has the advantages of good high temperature and high pressure characteristic, good frequency characteristic and good power characteristic, and the one-dimensional electron gas device in super high speed and low power consumption can be manufactured.
Owner:云南凝慧电子科技有限公司

One-dimensional electronic gas GaN-based HEMT (High Electron Mobility Transistor) device adopting selective area epitaxy and preparation method thereof

ActiveCN103400856AImprove high temperature and high pressure characteristicsImprove featuresSemiconductor/solid-state device manufacturingSemiconductor devicesSelective area epitaxyHigh pressure
The invention discloses a one-dimensional electronic gas GaN-based HEMT (High Electron Mobility Transistor) device adopting selective area epitaxy and a preparation method thereof, and mainly solves the problems of poor high temperature and high voltage characteristics, frequency characteristic and power characteristic of an existing one-dimensional electronic gas device. The device comprises a substrate, a buffering layer, a passivation layer and a protection layer from bottom to top; the buffering layer adopts GaN; the buffering layer is provided with barrier layer strips and masking layer strips, which are periodically arranged at intervals; both ends of each barrier layer strip respectively are a source electrode and a drain electrode; the passivation layer is positioned on the barrier layer strips and the masking layer strips; the passivation layer is provided with a grid slot; a grid electrode is arranged in the grid slot; and the barrier layer strips adopt AlGaN and the width of each barrier layer strip is in nanometer dimension so as to form one-dimensional electronic gas. Compared with Si-based and GaAs-based one-dimensional electronic gas devices, due to the adoption of a wide bandgap semiconductor GaN with the outstanding material characteristics, the one-dimensional electronic gas GaN-based HEMT device adopting selective area epitaxy has excellent high temperature and high voltage characteristics, frequency characteristic and power characteristic, and the ultrahigh speed and low power consumption one-dimensional electronic gas device can be made.
Owner:云南凝慧电子科技有限公司

High-frequency inverter power unit and high-frequency treatment method

The invention provides a high-frequency inverter power unit. The high-frequency inverter power unit comprises two bridge arms of the same circuit topology; the two bridge arms are completely symmetrical; each bridge arm comprises a power device which comprises a silicon carbide MOSFET (Metal Oxide Semiconductor Field Effect Transistor), a silicon carbide Schottky diode and a grid resistor and a resistance-capacitance absorbing resistor of the MOSFET; three pins of each silicon carbide MOSFET are G, D and S respectively; two of three pins of each silicon carbide Schottky diode, which are arranged at two ends respectively, are positive poles; the middle pin of the three pins of each silicon carbide Schottky diode is a negative pole; one end of each grid resistor is connected with a driver and the other end of each grid resistor is connected with the G pole of each silicon carbide MOSFET; the negative pole of each silicon carbide Schottky diode is connected with the D pole of each silicon carbide MOSFET; the two positive poles of each silicon carbide Schottky diode is are connected onto a direct current busbar; the S pole of each silicon carbide MOSFET is connected with one end of each resistance-capacitance absorbing resistor and then connected onto an alternating current busbar. According to the high-frequency inverter power unit, the application requirements of the ultrahigh frequency can be met.
Owner:BAODING SIFANGSANYI ELECTRIC

HZO/AO/HZO nano laminated film and preparation method and application thereof

The invention discloses an HZO/AO/HZO nano laminated film and a preparation method and application thereof. The film is composed of an HZO top layer, an AO middle layer and an HZO bottom layer, wherein the HZO top layer is formed by alternately laminating HfO2 film layers and ZrO2 film layers, the AO middle layer is an Al2O3 film layer, and the HZO bottom layer is formed by alternately laminating HfO2 film layers and ZrO2 film layers. According to the technical scheme, the HfO2 layers and the ZrO2 layers are alternately deposited, an interface is introduced through a nano laminated structure to regulate and control interface energy to stabilize a phase, growth of an electric tree is effectively hindered, and breakdown is avoided. In addition, the interface can reduce the electron injection depth and inhibit local phase decomposition, so that the fatigue performance is finally improved. On the other hand, the dielectric layer Al2O3 is introduced to promote the formation of a 180-degree domain so as to reduce a built-in electric field, weaken the fixed orientation degree of the electric domain and reduce the leakage current density. According to the invention, the technical problem of preparation of the HZO/AO/HZO nano laminated film with good ferroelectric performance can be solved, and the high-quality ferroelectric film can be produced in a simple and controllable mode.
Owner:CENT SOUTH UNIV

Low-resistance silicon on insulator-lateral insulated gate bipolar transistor (SOI-LIGBT) device capable of preventing snapback effect and manufacturing method thereof

The invention provides a low-resistance silicon on insulator-lateral insulated gate bipolar transistor (SOI-LIGBT) device capable of preventing a snapback effect and a manufacturing method thereof. A cell structure of the low-resistance SOI-LIGBT comprises a substrate, a buried oxide layer, a thick dielectric layer, a thick silicon layer drift region, a P well region, a P-type heavily-doped emitter region, a first N-type heavily-doped region, an N-type buffer region, a P-type heavily-doped collector region, a second N-type heavily-doped region, a collector dielectric blocking layer, a collector contact electrode, an ultrathin top-layer silicon drift region, an emitter contact electrode, a gate oxide layer, a poly-silicon gate, P strips and N strips, wherein the N strips are alternatively arranged in the thick silicon layer drift region in longitudinal directions of the P strips. The electric field of the buried layer is improved by employing the ultrathin top layer silicon drift region to increase the longitudinal breakdown voltage of an SOI device; the specific on resistance of the device is reduced by employing the thick silicon layer drift region; and for the ultrathin top layer silicon drift region and the thick silicon layer drift region, lateral linearity variable doping is used for adjusting surface electric field distribution, so that the specific on resistance is greatly reduced as well as high breakdown voltage of the device is greatly maintained.
Owner:UNIV OF ELECTRONIC SCI & TECH OF CHINA +1
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