High-integration photoacoustic gas sensor based on optical path optimization

Abstract

The invention discloses a high-integration photoacoustic gas sensor based on optical path optimization, the high-integration photoacoustic gas sensor comprises a substrate, a shell forming a sealed gas chamber with the substrate and a radiation source arranged in the gas chamber, a plug board is vertically arranged on the substrate in the gas chamber, and the radiation source is arranged on the plug board; a light absorption structure is arranged on the inner side wall, far away from the radiation source, of the shell in the air chamber, a plurality of cambered surface reflection structures are arranged on the inner side wall of the shell of the air chamber, the cambered surface reflection structures are distributed at the upper position and the lower position of the inner side wall of the shell of the air chamber, and light emitted by the radiation source reaches the light absorption structure after being reflected by the cambered surface reflection structures; an air hole is formed in the side surface of the air chamber; a waterproof breathable film covers the air hole; and a microphone, an ASIC (Application Specific Integrated Circuit) chip and a control element are arranged on the substrate in the air chamber. According to the photoacoustic gas sensor disclosed by the invention, the purposes of miniaturization and integration are achieved, and meanwhile, the detection precision, the detection sensitivity and the detection limit can be improved.

Description

technical field [0001] The invention relates to the field of photoacoustic measurement, in particular to a highly integrated photoacoustic gas sensor based on optical path optimization. Background technique [0002] With the continuous development of society, the types of gases that people come into contact with in production and life are becoming more and more complex, and gas concentration detection has an increasingly important impact on production and life. Traditional gas detection methods include electrochemical methods, electrical methods, optical methods, etc. Among them, the gas sensor based on optical method has many advantages such as high sensitivity and good selectivity. [0003] The photoacoustic effect refers to the phenomenon that gas absorbs modulated light and generates sound pressure. Its basic theory is the process of generating photoacoustic signals from light to heat to sound. A gas has a strong absorption peak for light of a certain wavelength, and d...

AI Technical Summary

Problems solved by technology

At the same time, the airtight photoacoustic cell is often large in volume and has high packaging requirements, making it difficult to miniaturize the photoacoustic sensor

In addition, in traditional photoacoustic gas sensors, the radiation source and microphone usually need to be packaged independently and then repackaged into the sensor, which also leads to low integration, complicated use, and high cost.

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