Chemical vapor deposition equipment for high-purity pyrolytic carbon coating

Abstract

The chemical vapor deposition equipment comprises a chemical vapor deposition furnace and a PLC control cabinet, a steel cage and a muffle cylinder are arranged in the chemical vapor deposition furnace, the muffle cylinder is located in the steel cage, a heat preservation felt is arranged on the inner wall of the steel cage, a heating plate is arranged between the heat preservation felt and the muffle cylinder, and the PLC control cabinet is connected with the PLC control cabinet. The upper end of the muffle cylinder is connected with an exhaust pipe, the exhaust pipe is connected with a tail gas treatment system, the bottom of the muffle cylinder is hermetically connected with a gas distribution mechanism, the gas distribution mechanism is connected with a gas supply system, and the gas supply system and the tail gas treatment system are both electrically connected with a PLC control cabinet. The space of the deposition chamber in the equipment is expanded, the coating deposition of large-size graphite products is realized, the sizes and types of the produced products are increased, and the market application and the product quality are expanded; and the interior of the deposition chamber is sealed through the muffle cylinder, so that the deposition chamber is isolated from equipment in the furnace, the reaction temperature is increased, and the use safety of the equipment in the furnace is protected.

Description

technical field [0001] The invention relates to the technical field of chemical vapor deposition equipment, in particular to a chemical vapor deposition equipment for high-purity pyrolysis carbon coating. Background technique [0002] In recent years, the application of graphite materials in semiconductors and other fields has become more and more extensive. However, many manufacturing processes in the semiconductor field currently involve high temperatures and harsh environments using corrosive gases. Under these environmental conditions, the loss of graphite materials is accelerated, the service life is shortened, and even The function failure will seriously affect the safety production and process stability. [0003] In addition, the graphite material itself has a large blackness coefficient and a low reflectivity of the substrate surface. When used as a thermal insulation material, it absorbs a lot of heat, which is extremely unfavorable for energy saving and consumption...

AI Technical Summary

Problems solved by technology

However, the current production equipment is limited by the temperature uniformity and atmosphere uniformity, the size of the equipment is limited, the effective space available inside the equipment is small, and there is no way to realize the coating deposition of large-size graphite products, resulting in limited market applications; and The existing CVD coating equipment generally does not have the internal protection function, allowing the reaction gas to spread inside the thermal field, which often causes insulation failure of the heating device, and accidents such as heater ignition, resulting in potential safety hazards

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