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Mosaic snapshot microfilter array based on nanoimprint and preparation method thereof

A filter array and nano-imprinting technology, which is applied in the direction of microlithography exposure equipment, optical filters for photography, and photoplate-making process for patterned surfaces, etc. Matching and other issues to achieve the effect of improving yield, simplifying process steps and processes, and designing flexibly

Pending Publication Date: 2022-07-12
CENT SOUTH UNIV
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Problems solved by technology

The disadvantage is that the more filtering channels, the more complex the process, and the edge of the narrow-band filter unit corresponding to the CCD pixel is easily affected by the process, and cannot be completely matched with the pixel, and the performance is difficult to guarantee

Method used

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  • Mosaic snapshot microfilter array based on nanoimprint and preparation method thereof
  • Mosaic snapshot microfilter array based on nanoimprint and preparation method thereof
  • Mosaic snapshot microfilter array based on nanoimprint and preparation method thereof

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Embodiment Construction

[0045] The preparation method of the mosaic snapshot micro-filter array based on nano-imprinting of the present invention is to use nano-imprinting technology, by means of etching or permanent curing, to make the Fabry-Perot periodic interference filter film structure The control, specifically, is to control the thickness of the Fabry-Perot cavity in the membrane system, so as to conveniently prepare a mosaic snapshot micro-filter array. The invention is flexible in design, and different micro-filter arrays can be designed according to different applications. The process is simple, the process difficulty is not affected by the number of filtering spectral channels, can be mass-produced, and has wide application prospects in the field of hyperspectral imaging.

[0046] The present invention will be further described below through specific embodiments and in conjunction with the accompanying drawings. As an example, we use a combination of nanoimprinting and etching to fabricat...

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Abstract

The invention relates to the field of optical thin film preparation, semiconductor technology and multispectral imaging, in particular to a mosaic snapshot microfilter array based on nanoimprint and a preparation method of the mosaic snapshot microfilter array based on nanoimprint. The thickness of the Fabry-Perot cavity of the microfilter unit is regulated and controlled by means of etching or ultraviolet radiation curing and the like, so that the mosaic snapshot microfilter array is conveniently prepared. The method can be adopted when the microfilter array is prepared on the substrate, and can also be adopted when the microfilter array is directly prepared on the image sensor chip. The method is not limited by the number of filtering channels, the Fabry-Perot cavity thickness adjustment of all working wavelength film systems is completed in parallel at a time, the process is simple, batch production is easy, the multispectral detection technology can be promoted and popularized, and the method has great practical value.

Description

technical field [0001] The invention relates to the fields of optical film preparation, semiconductor technology and multi-spectral imaging, in particular to a nano-imprint-based mosaic snapshot micro-filter array and a preparation method. The nano-pressing method is used to adjust the Fabry-Perot periodic interference The cavity thickness of the film system is used to prepare a mosaic snapshot microfilter array, which can be applied to spectral imaging. Background technique [0002] In the late 1970s and early 1980s, on the basis of researching and summarizing the spectral characteristics of various ground objects, everyone gradually realized that if continuous narrow-band imaging can be achieved, it is possible to realize the direct identification of ground minerals, which results in the formation of spectrum. Imaging spectroscopy technology combined with image. In 1983, the Jet Propulsion Laboratory of the United States developed the first aerial imaging spectrometer (AI...

Claims

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Application Information

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IPC IPC(8): G03F7/00G03F7/20G02B5/28G03B11/00
CPCG03F7/0005G03F7/0002G03F7/70491G02B5/285G03B11/00Y02A40/10
Inventor 方靖岳谢文科
Owner CENT SOUTH UNIV
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