Semiconductor low-light-cavity acceleration sensor chip and monitoring system and method thereof
An acceleration sensor and semiconductor technology, applied in the direction of using inertial force for acceleration measurement, etc., can solve the problems of limited range, low resolution, low degree of intelligence, etc., and achieve the effect of improving integration.
Pending Publication Date: 2022-07-29
XIAN SINO HUAXIN MEASUREMENT & CONTROL
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Problems solved by technology
However, the existing reports and patents have disadvantages such as limited range, low resolution, and low intelligence.
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[0032] The technical scheme that the present invention solves the above-mentioned technical problems is as follows:
[0033] The present invention provides a semiconductor micro-cavity acceleration sensor chip, refer to figure 1 As shown in the figure, the semiconductor micro-cavity acceleration sensor chip includes: a mirror structure 1, an acceleration sensitive structure 2 and an underlying structure 3 arranged in order from top to bottom along the vertical direction. The mirror structure 1 is used to receive infrared light, so After the infrared light penetrates the mirror surface structure 1, multiple reflections occur to form multiple beams of reflected light, and the multiple beams of reflected light penetrate the mirror surface structure 1 to form multi-beam interference; the acceleration sensitive structure 2 includes a mass block 22, The mass 22 can move in the vertical direction; the semiconductor micro-optical cavity acceleration sensor chip has a working mode, in ...
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The invention discloses a semiconductor low-light-cavity acceleration sensor chip and a monitoring system and method thereof, and belongs to the technical field of acceleration sensors.The semiconductor low-light-cavity acceleration sensor chip comprises a mirror surface structure, an acceleration sensitive structure and a bottom layer structure which are sequentially arranged from top to bottom in the vertical direction, the mirror surface structure is used for receiving infrared light, the infrared light is reflected for multiple times after penetrating through the mirror surface structure so as to form multiple beams of reflected light, and the multiple beams of reflected light form multi-beam interference after penetrating through the mirror surface structure; the acceleration sensitive structure comprises a mass block, and the mass block can move in the vertical direction; the semiconductor low-light-cavity acceleration sensor chip has a working mode, and in the working mode, the bottom layer structure and the mirror surface structure both have voltage, so that the equivalent stiffness of the mass block can be reduced, and sensitivity adjustment is achieved. The integrated level of the sensor can be improved, and the measuring range can be expanded.
Description
technical field [0001] The invention relates to the technical field of acceleration sensors, in particular to a semiconductor micro-optical cavity acceleration sensor chip and a monitoring system and method thereof. Background technique [0002] High-performance accelerometers are key components of cutting-edge equipment, and have wide demands and applications in military, civil and other fields. According to the difference of zero bias stability and scale factor stability, acceleration sensors are generally divided into four levels: consumer level, tactical level, navigation level and strategic level. Existing silicon micro-sensors have basically occupied consumer-level and tactical-level scene applications. With the further maturity of semiconductor micro-processing technology, silicon micro-acceleration sensors are expected to enter the higher-end market. [0003] The Fabry-Perot optical cavity is an optical cavity structure composed of two parallel mirrors. After the li...
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Login to View More IPC IPC(8): G01P15/03
CPCG01P15/03
Inventor 刘尚波徐金涛段启航李莉石念宝王辉王嘉杨一凤
Owner XIAN SINO HUAXIN MEASUREMENT & CONTROL