Laterally coupled photoelectric detector

Abstract

The invention discloses a lateral coupling photoelectric detector which comprises a substrate layer, a waveguide layer, an absorption layer and an electrode layer. The waveguide layer is arranged on the substrate layer, the upper surface of the waveguide layer is provided with a plurality of parallel and equidistant square grooves, a square protruding waveguide column is formed between every two grooves, the width of the grooves is equal to that of the waveguide columns, and the width of the waveguide columns is matched with one or more coupling periods. And the repeated grooves and waveguide columns form a wedge-shaped structure. The absorption layer is arranged on the waveguide layer and close to one side of the wedge-shaped structure. A heterojunction is formed between the absorption layer and the waveguide layer. The absorber layer is configured to generate charge carriers when light is incident. According to the photoelectric detector, the light incidence direction is perpendicular to the direction of the waveguide column, light is coupled on the side face of the waveguide column and laterally coupled, the problem that a light field is periodically distributed on the germanium absorption layer in the transmission direction is avoided, alternating distribution of carrier concentration intensity is effectively weakened, the carrier shielding effect is further weakened, and the bandwidth and responsivity of a device are improved.

Description

[0001] This patent application claims the application date of June 11, 2021, the application number is CN202110654242.2, the original acceptance agency is the State Intellectual Property Office of China, and the invention-creation name is "a laterally coupled photodetector". technical field [0002] The invention relates to the technical field of photodetectors, in particular to a laterally coupled photodetector. Background technique [0003] In recent years, with the rapid development of the Internet of Things, the optical fiber communication system, as an important support for the Internet of Things, has received more attention. In the field of long-distance backbone network, with the maturity and development of optical transmission technology, there has been a boom in the construction of trunk transmission network worldwide, and the technology of transmission bandwidth and transmission capacity has developed rapidly. [0004] With the development of optical fiber communic...

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Problems solved by technology

[0006] In order to solve the current silicon-based germanium detectors, the evanescent wave presents the characteristic of periodic coupling back and forth in the silicon / germanium material during transmission, which will cause serious uneven distribution of optical power in the germanium absorbing layer. Will reduce the bandwidth of the detector and reduce the saturation characteristics of the device, the present invention proposes a side-coupled silicon-based germanium detector

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