Mach-Zender phase shift vector shear interferometer
A shear interferometer and interferometer technology, applied in instruments, measuring devices, scientific instruments, etc., can solve problems such as high phase shift accuracy, shear wave front interference, and inapplicability of semiconductor laser light sources.
Inactive Publication Date: 2006-08-16
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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However, the non-overlapping error of the original wavefront will interfere with the shear wavefront; and it is non-equal optical path coherence, which is not suitable for semiconductor laser sources with short coherence length
[0005] Prior art [3] (see Jae Bong Song, Yun Woo Lee, In Won Lee, Yong-Hee Lee, "Simple Phase-shifting method in a wedge-platelateral-shearing interferometer", Appl.Opt.vol43, No.20 , 3989-3992(2004)), the single-wedge phase-shift shearing interferometer described in Murty plate shearing interferometer uses a wedge to introduce the wave surface tilt, and the phase shift is generated by the movement of the wedge, and the period The amount of movement required for the internal 2π phase shift is on the order of mm, so the phase shift accuracy is high, but it is still non-equal optical path coherence and unidirectional shear
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[0032] see first figure 1 , figure 1 It is the structural representation of the best embodiment of the Mach-Zehnder type phase-shift vector shearing interferometer of the present invention, as seen from the figure, the composition of the Mach-Zehnder type phase-shift vector shearing interferometer of the present invention is: the first beam splitter plate 1 , the second beam splitting plate 4, the first reflective plate 2 and the second reflective plate 3 are arranged parallel to each other to form a Mach-Zehnder type structure; between the first beam splitting plate 1 and the first reflective plate 2, a split wedge is arranged 5. The wedge angle of the wedge plate is α, and the incident angle of the light beam on the wedge plate is θ; a wedge plate 6 is arranged between the second beam splitting plate 3 and the second reflecting plate 4, and the wedge angle of the wedge plate is α, The incident angle of the beam on the wedge is θ; the split wedge 5 and the wedge angle of the...
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The present invention relates to a Mach-Zenhder phase-shifting vector shearing interferometer. Its constitution is characterized by that first beam-splitting plate, second beam-splitting plate, first reflecting plate and second reflecting plate are mutually parallelly arranged to form Mach-Zehnder type structure. Said invention also provides the concrete structure between first beam-splitting plate and first reflecting plate and the concrete structure between second beam-splitting plate and second reflecting plate, and provides the working principle of said interferometer. A CCD camera is set after the described second beam-splitting plate, and its output end is connected with input end of the described interference fringe processing system. Said invention is suitable for making wave surface measurement of semiconductor laser light source whose coherent length is short.
Description
technical field [0001] The invention relates to beam wavefront measurement, which is a Mach-Zehnder phase-shift vector shearing interferometer, and is especially suitable for high-precision measurement of semiconductor laser wavefronts with short coherence lengths. technical background [0002] Shearing interferometers are widely used in the testing of optical components and optical systems. Shearing interferometers do not require a separate ideal reference surface, but interfere between the original wavefront and its own sheared wavefront, thus effectively reducing the system size. error. With the development of computer technology, PSI phase-shift interferometry technology is used for interferogram analysis and processing. PSI records a series of interferograms with reference phase changes, and then restores the phase of the original wavefront point by point. The reference mirror, usually driven by a PZT piezoelectric ceramic, moves in a period to generate a phase shift. ...
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IPC IPC(8): G01B9/02G01J9/02G01M11/00
Inventor 徐荣伟刘立人栾竹刘宏展
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI