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Measuring method and instrument comprising image sensor

A technology of an image sensor and a measurement method, which is applied to the device implementing these methods, and the measurement field of the measured substance of the sample concentration, which can solve the problems of uneven light and poor sensitivity, etc.

Inactive Publication Date: 2007-04-04
ARKRAY INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010] If the image sensor is to detect the two-dimensional shading distribution of the test piece with high precision, in addition to uneven light irradiation, lens aberration, etc., due to the sensitivity difference between the pixels of the image sensor, light within the plane will be generated. uneven

Method used

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  • Measuring method and instrument comprising image sensor
  • Measuring method and instrument comprising image sensor
  • Measuring method and instrument comprising image sensor

Examples

Experimental program
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Embodiment 1

[0085] As Example 1, an area sensor is used as a sensor, and a two-dimensional reflectance measurement device to which the output correction method based on the first aspect of the present invention is applied is shown.

[0086] The linearization correction data held in the linearization correction data storage unit 102 and the optical unevenness correction data held in the optical unevenness correction data storage unit 106 can be generated in the reflectance measurement device or the test piece measurement device. Therefore, as shown in FIG. 2 , it is desirable to further have: a photodetector 10 that is installed at a position to receive reflected light from a test piece held on a sample stage, and has a linear output for the amount of light received; The output of the image sensor when the amount of light changes is proportional to the output of the photodetector 10, and the linearization correction data of the output of the image sensor 8 is corrected, and stored in the li...

Embodiment 2

[0191] As a second embodiment of the reflectance measuring device, FIG. 16 shows the outline of a device to which the second correction method is applied.

[0192] Compared with the reflectance measurement device of FIG. 3 , the difference is that the photodetector 10 for monitoring the light quantity is not arranged. Other structures are basically the same. The reflected light of the object 2 passes through the reflector 5, passes through the lens 6, and forms an image on the area sensor 8a. Zone sensor 8a is shown to include amplifier 22 of FIG. 3 . The detection signal of the area sensor 8a passes through the A / D converter 24, and is read by the calculation part 28a. Calculator 28a corresponds to RAM 26 and personal computer 28 in FIG. 3 . A display 30, a keyboard 32, and a printer 34 are connected to the calculation unit 28a. 36 is an image storage unit for storing read image data, and is constituted by, for example, a hard disk device. In order to convert the reflecta...

Embodiment 3

[0205] As a third embodiment of the reflectance measuring device, a device to which the output correction method according to the third aspect is applied will be described.

[0206] The optical system is the same as that shown in Figure 16.

[0207] In this embodiment, an area sensor 8a whose exposure time to light is programmable is used. As such an area sensor, for example, a CMOS image sensor (H64283FP) manufactured by Mitsubishi Corporation used in the embodiment of FIG. 3 is used. However, the area sensor 8a used is not limited to a CMOS image sensor, that is, a CCD image sensor can be used as long as its exposure time is programmable.

[0208] Although the output of the area sensor 8a does not have linearity with respect to the amount of received light, the amount of received light is proportional to the exposure time. In addition, since the amount of light received is proportional to the reflectance, by using one reference plate and making the exposure time different,...

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Abstract

A linearizing correction unit (104) carries out a linearizing correction process on the output of an image sensor (8) based upon linearizing correction data stored in a linearizing correction data holding unit (102), and a light-irregularity correction unit (108) carries out a light-irregularity correction process on the image sensor output that has been subjected to the linearizing correction process based upon light-irregularity correction data stored in a light-irregularity correction data holding unit (106). A refection factor calculation unit (110) calculates an integral value of the in-plane reflection factor of a test piece by using the output that has been subjected to the linearizing correction and light-irregularity correction with respect to pixel outputs of the image sensor (8) obtained when the test piece having in-plane density irregularities is measured. A quantifying unit (114) applies calibration curve data of a calibration-curve-data holding unit (112) to the integrated reflection factor obtained by the reflection factor calculation unit so that a sample density of the test piece is calculated.

Description

technical field [0001] The present invention relates to a method of measuring a measured object such as a test piece with light, receiving light from the measured object with an image sensor such as an area sensor or an image scanner, and performing measurement two-dimensionally or along a straight line. Based on the measured value, A method for measuring a sample to be measured for obtaining the concentration of a sample in a part to be detected, and an apparatus for carrying out the method. [0002] In the present invention, light from an object to be measured includes reflected light, transmitted light, fluorescence, phosphorescence, chemiluminescence, and any other light used in quantitative or qualitative measurements. Background technique [0003] In photodetectors, there are single-element photodetection elements such as photodiodes, linear sensors in which photodetection elements such as photodiodes are arranged on a line, and CCD (charge-coupled device) sensors and ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/17G01J1/18G01J1/20G01J3/28G01N21/27G01N21/59
CPCG01N21/274G01J1/124G01N21/5907G01N2021/5957G01J1/1626G01N2021/5949
Inventor 和田敦江川浩司
Owner ARKRAY INC
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