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Carriage and transfer gear used same

A technology of transmission mechanism and support frame, which is applied in the direction of electrical components, semiconductor/solid-state device manufacturing, circuits, etc.

Inactive Publication Date: 2007-05-09
AU OPTRONICS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In order to solve the defects of the existing support frames, the relevant manufacturers have tried their best to find a solution, but no suitable design has been developed for a long time. This is obviously a problem that the relevant industry is eager to solve

Method used

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  • Carriage and transfer gear used same
  • Carriage and transfer gear used same
  • Carriage and transfer gear used same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0066] The specific structure, features and functions of the support frame proposed according to the present invention and the transmission mechanism using the support frame will be described in detail below with reference to the accompanying drawings and preferred embodiments.

[0067] Please refer to FIG. 4 and FIG. 5 , FIG. 4 is a top view of a support frame according to an embodiment of the present invention, and FIG. 5 is an enlarged view of area A of FIG. 4 . The supporting frame 200 is suitable for supporting a substrate 50 . The supporting frame 200 is mainly composed of a main supporting member 210 , at least one secondary supporting member 220 (here two are taken as an example) and a plurality of positioning blocks 230 .

[0068] The main supporting member 210 has a main supporting surface 212 . The secondary support 220 is pivotally disposed on the edge of the main support 210 by a pivot shaft 224 . Each secondary supporting member 220 has a primary supporting sur...

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PUM

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Abstract

Holding frame is composed of a main holding piece, an assistant holding piece and multiple set pieces. Main holding piece possesses a main holding face. The assistant holding piece pivoted on the main holding piece possesses an assistant holding face. The assistant holding piece includes first part and second part positioned at two sides of pivoted place. The assistant holding piece is suitble to motion between first position and second position. When being at first position, the second part is higher than the main holding face. set pieces are arranged on main holding face, and some of set pieces is arranged on the assistant holding face. Features are: moving the holding frame out of working space does not make set pieces on assistant holding piece touch base plate causing deflection od base plate or bringing base plate out of the working space. Thus, the invention insures production efficiency of plane display.

Description

technical field [0001] The invention relates to a support frame (Holder) and a transfer mechanism using the support frame, in particular to a support frame suitable for supporting a substrate and a transfer mechanism using the support frame. Background technique [0002] The rapid progress of the multimedia society is mostly benefited from the rapid progress of semiconductor devices or man-machine display devices. As far as human-machine display devices are concerned, flat-panel displays with superior characteristics such as high image quality, good space utilization, low power consumption, and no radiation have gradually become the mainstream of the market. [0003] In the manufacturing process of most flat panel displays, various processes such as thin film deposition, photolithography and etching are performed on a substrate. Taking the lithography process as an example, it mainly includes processes such as photoresist coating, exposure, development, and photoresist stri...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/68H01L21/00
Inventor 徐顺龙枫政国沈秋威曾焕均
Owner AU OPTRONICS CORP