Indentor and method for producing the same

A technology of indenter and thin film, applied in the direction of testing material hardness, strength characteristics, electrical/magnetic roughness/irregularity measurement, etc., can solve problems such as complex methods and only suitable for brittle materials

Inactive Publication Date: 2002-08-21
姜辛
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  • Abstract
  • Description
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Problems solved by technology

The latter method is very complicated, and the acoustic detection method is an indirect method suitable only for brittle

Method used

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  • Indentor and method for producing the same
  • Indentor and method for producing the same
  • Indentor and method for producing the same

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Embodiment Construction

[0021] figure 1 A reaction device 1 for plasma-enhanced chemical vapor deposition is given. The reactor consists of a stainless steel reaction chamber 2 and a microwave generator 3 . Microwave power is adjustable up to 1.5 kW. The high-frequency induction heating system 4 is used to heat the diamond indenter placed directly on the molybdenum plate sample stage. Diamond indenters are commercially available.

[0022] The above-mentioned molybdenum plate 5 is directly placed flat on the graphite heating table 6 . Such a heating table is described in German patent DE19905980A1. By adjusting the temperature of the graphite heating stage, the basic temperature of the sample can be continuously controlled in the range of 200K-1100K. The surface temperature of the sample substrate can be directly measured by a thermometer 7 .

[0023] After the substrate is placed in the reaction chamber, the reaction chamber is evacuated to 10Pa to 30Pa. Substrate 1 is then heated to 600 to 80...

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Abstract

The invention discloses a new electronic hardometer indenter which is applicable for measuring material microhardness and binding strength between a film and a base. This indenter is form by steps of vapor phase growing boron doped conductive diamond films, diamond/carbides composite films or amorphous carbon films on the diamond indenter surface. The invention innovates the traditional material hardness measuring method with advantages of easy operation, accurate measuring and possibility of on-line measuring for complex geometry workpiece.

Description

technical field [0001] The invention relates to a durometer indenter used for measuring the microhardness of materials and the bonding strength of thin films. Examples include Vickers or Knoop indenters for microhardness measurement of materials. Background technique [0002] The measurement method of material microhardness is usually Vickers method (ISO-Norm6507) or Knoop method (ISO-Norm4545). In both measurement methods, a hard indenter must be used. The indenter is pressed into the surface of the sample under a given load, and then the experimenter measures the width of the indentation under a microscope, and then calculates the hardness value. The premise of obtaining accurate hardness value by this method is to use high hardness indenter. If the hardness of the indenter material is not high enough, its elasticity will lead to systematic errors in the measurement. Therefore, most of the indenters are made of diamond. These diamonds are mainly from natural diamonds o...

Claims

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Application Information

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IPC IPC(8): G01N3/00G01N3/42
CPCG01N3/42G01N2203/0098G01N2203/0226
Inventor 姜辛乌丁·沙麦塔特
Owner 姜辛
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