Pulse intelligent radio-frequency modulation controller
A technique of modulating signal and modulating waveform, which is applied in the field of power generators that output waveforms, and can solve problems that have not yet been proven and are difficult to achieve
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[0017] The following descriptions of preferred embodiments are merely exemplary in nature and in no way limit the invention and its application or uses. see figure 1 , which shows a plasma power generator 10 for providing a power output 12 to a plasma processing system (not shown). It is within the scope of the present invention to provide a power output 12 where the characteristic parameters controlled may be output voltage, output current, output forward power, output reflected power, and output energy. The plasma power generator 10 includes a system controller 14 for generating control signals and processing monitoring and fault signals. The external interface 16 is connected to the system controller 14 through an interface bus, and is used for exchanging information with external devices and users. A driver 18 connected to the system controller 14 generates buffered drive signals corresponding to the respective control signals. The drive signal drives a modulator 20 whi...
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