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Method and apparatus for vacuum film-coating of small size workpiece

A vacuum coating, small-size technology, applied in the direction of vacuum evaporation coating, sputtering coating, ion implantation coating, etc., can solve the problem of reducing the coating speed and small workpiece loading at one time, affecting the coating quality and the reliability of the coating system. Problems such as workpiece dimensional accuracy and appearance quality, to achieve the effect of increasing the effective coating surface area, improving coating production efficiency, and reducing the possibility of scratches and wear

Inactive Publication Date: 2003-03-12
北京丹普表面技术有限公司
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Problems solved by technology

[0006] When the cage rotates at low speed, the small workpieces will stay at the bottom of the cage due to the action of gravity and overlap each other, which reduces the coating speed or the loading capacity of small workpieces at one time; secondly, during the rotation of the cage, the small workpieces And between rolling, sliding and collision with the cage wall, it is easy to cause scratches and wear on the surface of the workpiece, affecting the dimensional accuracy and appearance quality of the workpiece; finally, the debris and Dirt, easy to fall onto important components such as the coating evaporation source at the bottom of the vacuum chamber, causing them to be polluted or damaged, affecting the quality of the coating and the reliability of the coating system

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  • Method and apparatus for vacuum film-coating of small size workpiece
  • Method and apparatus for vacuum film-coating of small size workpiece
  • Method and apparatus for vacuum film-coating of small size workpiece

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Embodiment Construction

[0028] The device proposed by the present invention for the vacuum coating of small-sized workpieces has a structure such as image 3 and Figure 4 As shown, it includes a motor 1, a reducer 2 and a vacuum coating chamber, wherein the vacuum coating chamber includes a vacuum chamber 3, a mesh cage and an evaporation source 5, and the mesh cage is placed in the vacuum chamber 3, and the motor 1 is connected to the mesh cage through the reducer 2 The rotating shaft connection is characterized in that there are multiple evaporation sources 5, and also includes a control power supply 11. A plurality of evaporation sources 5 are placed on the circumference of the vacuum chamber. The rotating speed of the motor 1 is controlled by a control power supply 11 .

[0029] The cage for small-sized workpieces proposed by the present invention is periodically controlled to rotate at two different rotating speeds (Nd and Nf). Wherein Nd=Nc+Δd, Nf=Nc-Δf, Δd and Δf can be selected between 1 ...

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Abstract

A method and apparatus for vacuum coating of small workpieces are disclosed. Said method is characterized by that the cage containing small workpieces periodically rotates at a certain speed which is controlled to make the small workpieces uniformly close to the surface of cage, so eliminating the overlap between workpieces and increasing the efficiency and quality of vacuum coating. Said coating apparatus is composed of controlled power supply, motor, speed reducer, and vacuum coating chamber which consists of vacuum chamber, cage and multiple evaporating sources.

Description

technical field [0001] The invention relates to a method and a device for vacuum coating a small-sized workpiece, belonging to the technical field of vacuum coating. Background technique [0002] When vacuum coating medium and large-sized workpieces, special fixtures can be designed to ensure the proper spatial position and density of the workpieces in the vacuum chamber, and to achieve the maximum furnace loading and improve production efficiency under the premise of ensuring the coating quality. [0003] For small-sized workpieces of various shapes, such as discs, (long) squares, rectangular cubes, cylinders, spheres or ellipsoids, etc. Usually the line size of each workpiece should be within 15 mm, if there are two smaller lines, the last line size can be increased appropriately, such as increasing to 25 mm; the weight of each work piece should not exceed 25 grams . In order to facilitate a large number of loading and unloading, while avoiding the inefficiency caused by...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24
Inventor 罗蓉平沈齐英董骐杜建钟钢
Owner 北京丹普表面技术有限公司
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