Black composite particles for semiconductor sealing material use and semiconductor sealing material
A technology of composite particles and sealing materials, which is applied in semiconductor devices, semiconductor/solid-state device manufacturing, semiconductor/solid-state device components, etc., and can solve the problem of low resistance of semiconductor sealing materials
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Embodiment 1
[0225] (Manufacture of black composite particles (I))
[0226] Silica particles (particle shape: spherical, original average particle size 0.45μm, sphericity 1.02, BET specific surface area value 5.4m 2 / g, liquidity index 52, L * Value 93.1, a * Value 0.4, b * Value 0.3, C * Value 0.5) and black pigment (type: carbon black (furnace carbon black), particle shape: granular, original average particle size 0.022μm, BET specific surface area value 133.5m 2 / g, L * Value 14.6) pre-mixed so that the black pigment relative to 100 parts by weight of the silica particles, converted to 10 parts by weight in terms of C, was added to Mikaner Fujiman AMS-Lab (manufactured by Mikami Kron Co., Ltd.), and subjected to mechanochemical reaction , The black composite particles (I) with black pigment attached to the surface of the silica were obtained.
[0227] The prepared black composite particles (I) are spherical particles with an original average particle size of 0.45 μm and a sphericity of 1.04...
Embodiment 2
[0232] (Manufacture of black composite particles (II))
[0233] While the mill was running, 70 g of methylhydrodiene polysiloxane (trade name: TSF484: manufactured by GE Toshiba Silicone Co., Ltd.) was added to 7.0 kg of silica particles (particle shape: spherical, original average particle size) 0.45μm, sphericity 1.02, BET specific surface area value 5.4m 2 / g, liquidity index 52, L * Value 93.1, a * Value 0.4, b * Value 0.3, C *In the value 0.5), mixing and stirring were performed for 30 minutes with a line load of 588 N / cm (60 Kg / cm), and the stirring speed at this time was 22 rpm.
[0234] Then, while the crusher was running, 700g of black pigment (type: carbon black (furnace carbon black) was added within 30 minutes, particle shape: granular, original average particle size 0.022μm, BET specific surface area value 133.5 m 2 / g, L * Value 14.6) Mix and stir, and then mix and stir for 30 minutes with a line load of 588N / cm (60Kg / cm) to make the black pigment adhere to the methy...
Embodiment 3
[0241] (Manufacture of black composite particles (III))
[0242] While the mill was operating, 70 g of methylhydrodiene polysiloxane (trade name: TSF484: manufactured by GE Toshiba Silicone Co., Ltd.) was added to 7.0 kg of silica particles (particle shape: spherical, original average particle size) 3.22μm, sphericity is 1.02, BET specific surface area value is 0.8m 2 / g, the liquidity index is 48, L * The value is 93.2, a * The value is 0.4, b * Value is 0.6, C * In the value 0.7), mixing and stirring were performed for 30 minutes with a line load of 588 N / cm (60 Kg / cm). And the stirring speed at this time was 22 rpm.
[0243] Then, while the crusher is running, 700g of carbon black (particle shape: granular, original average particle size is 0.022μm, and BET specific surface area value is 133.5 m) within 30 minutes. 2 / g, L * The value is 14.6), and then mixed and stirred for 30 minutes with a line load of 588N / cm (60Kg / cm) to make the carbon black adhere to the methylhydrodiene...
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