Detection device and method for oscillating attitude of planar mirrow

Abstract

The present invention is detection device and method for oscillating attitude of planar mirror. Semiconductor laser is driven in AC modulation mode, and the laser beam is made to pass through shaping and collimating lens, polarizing and light splitting prism and quarter wave plate and transmit to planar mirror; the reflected light beam is focused onto collector lens to image on quadrant optoelectronic detector; the output signal of the detector is processed in preamplifier and calculation circuit to output alternate voltage signal representing the 2D oscillation amplitude of the planarmirror, the alternate voltge signal is processed in phase locking detection circuit and converted into DC voltage signals in two directions; and the DC voltage signals are A / D converted and processed in monochip computer with relevant software to obtain the 2D oscillating angles. The method is simple in measurement principle, and the device has measurement range of + / -30 min and measurement precision superor to 0.5 min.

Description

technical field [0001] The invention relates to a method and a device for measuring the swing attitude of a plane mirror, belonging to the technical field of photoelectric measurement. Background technique [0002] At present, the more advanced plane mirror swing attitude detection devices in the existing technology are mostly based on the principle of optical interferometry. The measuring device made by this principle has a complex structure, a large volume, and is not flexible enough to use; the traditional plane mirror swing attitude detection device is a photoelectric Autocollimator, photoelectric autocollimator generally uses ordinary incandescent bulbs as the light source, the heat of the light source often brings mechanical deformation and thermal drift of the instrument, and the oscillator slit link in its structure also brings unstable factors, high precision The volume of the photoelectric autocollimator is also relatively large; some use the measurement principle ...

AI Technical Summary

Problems solved by technology

[0002] At present, the more advanced plane mirror swing attitude detection devices in the existing technology are mostly based on the principle of optical interferometry. The measuring device made by this principle has a complex structure, a large volume, and is not flexible enough to use; the traditional plane mirror swing attitude detection device is a photoelectric Autocollimator, photoelectric autocollimator generally uses ordinary incandescent bulbs as the light source, the heat of the light source often brings mechanical deformation and thermal drift of the instrument, and the oscillator slit link in its structure also brings unstable factors, high precision The volume of the photoelectric autocollimator is also relatively large; some use the measurement principle of the photoelectric autocollimator, and use the linear array CCD as the detection element to measure the two-dimensional angle, such as "linear array CCD for two-dimensional small angle measurement Research on "(Aviation Metrology Technology, 1997, 18(1), 3-6), although the processing circuit is simple and the speed is fast, the mechanical structure of the instrument is relatively complicated; in short, the above-mentioned measurement methods and devices are used to measure When the plane mirror swings, the structure is relatively large, and the installation and adjustment are relatively complicated. When the axial dimension of the measurement sensor of the detection device is less than 30mm, the measurement accuracy of less than one arc second cannot be achieved

[0003] In the prior art, the measurement principle of the photoelectric autocollimator is also used, and the position sensitive detector PSD (PositionSensitive Detector, referred to as PSD) is used as the detection element to measure the two-dimensional small angle, such as "Using the two-dimensional PSD device to measure the small angle Research - a new type of autocollimator" (Modern Metrology and Testing, 2001, 2, 40-43), the measuring instrument structure is relatively small, but because its analog signal processing part uses an analog divider circuit, its analog output Signal stability and accuracy are not high

Images