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Memory device

A technology for storage devices and storage units, which is applied in static memory, digital memory information, information storage, etc., and can solve the problem that the size of the layout area has a great influence

Inactive Publication Date: 2005-02-23
NEC CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0011] In addition, in a semiconductor memory device, since many memory cells are arranged, the size of a single memory cell greatly affects the size of the entire layout area of ​​the semiconductor memory device

Method used

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Experimental program
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no. 1 example

[0054] image 3 is a cross-sectional view showing the structure of a memory cell of the memory device according to the first embodiment of the present invention. Figure 4A is shown image 3 the floor plan of the storage unit, and Figure 4B is shown image 3 Schematic diagram of the layout of the storage unit. Figure 5A is shown image 3 A graph of the voltage-current characteristic curve between the source and the drain in a field effect transistor used as a memory cell in , and Figure 5B is shown image 3 Schematic diagram of the operation of the latch circuit of the memory cell.

[0055] like image 3 As shown, the memory cell of the memory device in the first embodiment includes a field effect transistor 104 , a field effect transistor 105 , a cell capacitor 106 and a resistance device 107 . Field effect transistor 104 is formed on substrate 103 . The field effect transistor 105 is provided adjacent to the field effect transistor 104 , and the channel region of...

no. 2 example

[0074] Image 6 is a cross-sectional view showing a memory device according to a second embodiment of the present invention for two memory cells. Figure 7 is shown Image 6 Schematic layout of the memory cell shown in .

[0075] like Image 6 As shown, each of the memory cells 1 and 2 serving as memory cells of the memory device in the second embodiment includes a field effect transistor 204 , a field effect transistor 205 , a cell capacitor 206 and a resistance device 207 . Field effect transistor 204 is formed on substrate 203 . Field effect transistor 205 is formed on field effect transistor 204 through insulating layer 216 . A resistive device 207 is formed on the source region 205S of the field effect transistor 205 to contact the source region 205S at one end. The gate 204G of the field effect transistor 204 is connected to the word line 202 , its source region 204S is connected to the bit line 201 , and its drain region 204D is connected to the source region 205S ...

no. 3 example

[0080] Figure 8 is a cross-sectional view showing a memory cell of a memory device according to a third embodiment of the present invention. Figure 9A is shown Figure 8 the floor plan of the storage unit, and Figure 9B is shown Figure 8 Schematic diagram of the layout of the storage unit. Figure 8 is shown along the Figure 9A The line B-B looks at the cross-sectional view of the memory device.

[0081] like Figure 8 As shown, similar to the first embodiment, the memory cell of the memory device in the third embodiment includes a field effect transistor 304 , a field effect transistor 305 , a cell capacitor 306 and a resistance device 307 . Field effect transistor 304 is formed on substrate 303 . Field effect transistor 305 is provided adjacent to field effect transistor 304 and the channel region electrically isolates substrate 303 . A resistive device 307 is formed on the source region 305S of the field effect transistor 305 to be connected to the source regio...

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Abstract

A memory device comprises a memory first MOSFET, a resistive element, and a second MOSFET. Memory cells are arranged in a matrix. Each cell is connected to a word line and a bit line and has a memory capacitor. The first MOSFET is fabricated on a substrate, the source region is connected to the bit line, the gate electrode is connected to the word line, and the drain region is connected to the memory capacitor. The second MOSFET has a channel region electrically insulated from the substrate. The source region of the second MOSFET is connected to a first potential through the resistive element, and to the drain region of the first MOSFET. The gate electrode of the second MOSFET is connected to a second potential, and the drain thereof is connected to a third potential.

Description

technical field [0001] The present invention relates to a memory device, and in particular to the arrangement of memory cells in a memory device having different negative resistance devices. Background technique [0002] A semiconductor random access memory (also simply referred to as "RAM" hereinafter), especially a 1T / 1C (1 transistor / 1 capacitor) type dynamic RAM (DRAM) including one transistor and one capacitive element, is known. Because the structure is simple, the 1T / 1C type DRAM achieves a gate density of a gigabit level. However, the electric charges accumulated in the capacitive element as bit data are attenuated at a predetermined time rate due to the drain current. Therefore, in the 1T / 1C type DRAM, the refresh operation needs to be periodically performed at a rate of several times per second to several thousand times per second. [0003] Static RAM (SRAM), on the other hand, does not require refresh operations and generally operates faster than DRAM. However,...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L27/11G11C11/404G11C11/412H01L21/8244H01L27/108
CPCH01L27/1104H01L27/108G11C11/4125H01L27/1112H01L27/11G11C11/404H10B12/00H10B10/15H10B10/00H10B10/12
Inventor 植村哲也
Owner NEC CORP