Micro-chamber four-electrode spectrum tube

Abstract

Quadrupole mass spectrum tube for analyzing residual gas in electrovacuum device includes quadrupole mass analyzer, ion source and ion detector. Cerametallies quadrupole mass analyzer is adopted in the invention. Porcelain tube is as vacuum body case. Four poles of quadrupole mass analyzer are in cavity of porcelain tube. Metallized electric layer is setup at two edge faces of the analyzer in order to prevent charge accumulation. Leading needle of metal pole passing through metallized hole in the porcelain tube from metallized electric layer or inner faces of four poles is led out of cavity of vacuum porcelain tube. Connection between porcelain tube and vacuum cavity of ion source and ion detector is vacuum sealed connection of metal-ceramics.

Description

technical field [0001] The invention relates to a quadrupole mass spectrometer for residual gas analysis of electric vacuum devices such as microwave devices, cathode ray tubes (CRT), field emission devices, and light sources. In addition to the functions of traditional quadrupole mass spectrometers, it also solves the problem of small volume , high vacuum microwave tubes, field emission displays and other electric vacuum devices are difficult to carry out non-destructive analysis of the residual gas in the tube during the exhaust process and before the product leaves the factory. Background technique [0002] The residual gas inside the electric vacuum device is one of the main factors affecting the performance of the electric vacuum device. In order to analyze the influence of the residual gas in the electric vacuum device on the failure of the device, mass spectrometry is often used. Except for small electric vacuum devices that can be directly ...

AI Technical Summary

Problems solved by technology

Because microwave tubes, field emission display panels and other devices have very small internal volumes, most of them are only a few milliliters to tens of milliliters, and large tubes are only a few hundred milliliters, and the vacuum inside the tube is relatively high, especially microwave tubes can It reaches the level of ultra-high vacuum, so the amount of residual gas in the tube is very small. Using this traditional quadrupole mass spectrometer tube and sampling vacuum system for analysis, the pressure of the residual gas to be analyzed will be greatly reduced after expansion. At the same time, the mass spectrometer tube and The background gas of the vacuum analysis system will greatly interfere with the analysis accuracy

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