Detection method for resonance frequency of resonant type piezoelectric microsensor
A resonant frequency, micro-sensor technology, applied in frequency measurement devices, measurement of force by measuring the frequency change of stressed vibration elements, etc. Effect
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[0023] The self-developed resonant PZT micro-cantilever sensor is detected by using the method of the invention. The dimensions of the PZT microbeam structure are 860 microns long, 300 microns wide, and 2 microns thick. PZT material is made of Korean INOSTEK The company's commercial products are prepared by the sol-gel process, and the precise thickness of the PZT layer in the microbeams is 210nm. After scanning the DC bias voltage of the excitation signal, it is found that the DC bias voltage and the resonant frequency of the PZT microbeam are related by a second-order function. When the DC bias electric field is less than 1×10 7 At V / m, there is a linear region between the DC bias voltage and the resonant frequency of the PZT microbeam. See image 3.
[0024] The experimentally measured relationship between the two is:
[0025] f=3.06598-0.04167U
[0026] f is the resonant frequency (kHz), and U is the DC bias voltage (V) applied to the PZT. From this measurement r...
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