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Problems solved by technology
However, trying BaTiO 3 When used as a piezoelectric / electrostrictive material, its piezoelectric / electrostrictive properties are worse than those of the PZT system, so it is rarely used as an actuator or sensor
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Embodiment 1
[0030] Using BaCO 3 , TiO 2 , Nb 2 O 5 , SrCO 3 , CuO as the starting material, the composition in the porcelain, the replacement amount of strontium to barium, A / B=(barium + strontium) / titanium (molar ratio) and Nb 2 O 5 , CuO were weighed according to the ratios shown in Table 1, respectively. These raw materials, 150 grams of zirconia balls with a diameter of 2 mm, and 400 grams of solvent as a medium, were wet mixed with a ball mill for 64 hours, and the particle size of the primary particles of each raw material was 1 micrometer or less.
[0031] After the obtained mixture was dried, it was calcined at a temperature of 900° C. for 2 hours in an air atmosphere, and the obtained calcined product was pulverized with a ball mill. During the pulverization process, the amount of zirconia balls, the pulverization time, etc. were appropriately adjusted, and the specific surface area of the powder after the pulverization treatment (hereinafter referred to as pulverized pow...
Embodiment 2
[0038] Next, using the same starting materials as in Example 1, in the composition of the porcelain material, 1 mol% of barium was replaced by strontium, A / B=(barium+strontium) / titanium (molar ratio)=1.005, Nb 2 O 5 , CuO were weighed according to external preparation and addition of 0.1 wt % and 0.2 wt % components, respectively. These raw materials were mixed in the same manner as in Example 1
[0039] The obtained mixture was subjected to calcination treatment in the same manner as in Example 1, and the obtained calcined product was subjected to pulverization treatment, and the specific surface area of the powder after pulverization treatment was adjusted as shown in Table 2.
[0040] Thereafter, as in Example 1, the pulverized powder was molded, and the molded product was sintered at the sintering temperature shown in Table 2 to obtain a ceramic material.
[0041] Next, after polarization treatment was carried out in the same manner as in Example 1, the strain in the l...
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Abstract
A piezoelectric / electrostrictive material of BaTiO3-based porcelain mainly composed of BaTiO3 and containing additives of CuO and Nb2O5, having a lateral strain in a 4000 V / mm electric field is 650 x 10-6 or more. The Curie temperature of the porcelain is 110-130 DEG C. The crystal phase at room temperature is composed of only tetragonal and cubic systems. The piezoelectric / electrostrictive porcelain material has a favorable strain characteristic, and preferably used for an actuator and a sensor.
Description
technical field [0001] The present invention relates to piezoelectric / electrostrictive materials sintered (fired) from ceramics, for example, to be assembled as electro-mechanical conversion components for position determination in precision work machines, optical path length control and flow control in optical devices Piezoelectric / electrostrictive materials for actuators and sensors in valves, etc. [0002] More specifically, it relates to a piezoelectric / electrostrictive material suitable for microsensors for measuring elements of liquid properties or microweights, and microscopic actuators with high storage capacity. Background technique [0003] For piezoelectric / electrostrictive materials, Pb(Zr, Ti)O was previously known 3 (hereinafter referred to as PZT) and BaTiO 3 etc., they are used in actuators, filters and various sensors etc. Since such piezoelectric / electrostrictive materials are excellent in comprehensive piezoelectric properties, PZT-based piezoelectric / e...
Claims
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