Reflective liquid crystal display device and method of manufacturing the same
A technology of a liquid crystal display device and a manufacturing method, which are applied in the directions of static indicators, nonlinear optics, instruments, etc., can solve the problem that the polarization separation optical system cannot be used with a reflective liquid crystal display device, the actual effectiveness is very different, and cannot be completely covered. and other problems to achieve the effect of avoiding breakdown phenomenon
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[0119] Next, specific features of the reflective liquid crystal display device according to this embodiment will be described with reference to examples. Before describing these examples, the characteristics of a related art reflective liquid crystal display device as a comparative example will be described below.
example 1-1 and 1-2
[0125] Next, Examples 1-1 and 1-2 will be described below. Experimental samples of the reflective liquid crystal display device were formed basically in the same manner and with the same specifications as in the above comparative example, except that the alignment films were on the pixel electrodes. More specifically, after cleaning the glass substrate on which the transparent electrode is formed and the silicon driving substrate on which the aluminum electrode serving as the reflective pixel electrode is formed, an alignment film is formed by evaporation using the following method, and then the A vertical liquid crystal material having a negative dielectric anisotropy Δε manufactured by Merck was injected between the substrates to form a reflective liquid crystal display device (as in Example 1-1). The specifications of the silicon drive substrate were the same as in the above comparative example, so the pixel spacing was 9 μm, and the groove width between the pixels was 0.6 ...
example 2-1 and 2-2
[0130] Next, Examples 2-1 and 2-2 will be described below. In these examples, the alignment film on the pixel electrode has a structure corresponding to FIG. 10A , that is, in this structure, the vertical vapor deposition film can serve as a base film for the first oblique vapor deposition alignment film and the second oblique vapor deposition alignment film form. An experimental sample of a reflective liquid crystal display device was formed by the same method and the same specifications as in the above-mentioned comparative example, except for a part related to film formation.
[0131] The method of forming the alignment film will be described below. As shown in Figures 13A-13C, a clean silicon driven substrate is introduced into an evaporation apparatus 80 with a substrate rotation system in which the angle of incidence of the evaporated particles 83 with respect to the substrate normal direction can be varied and the incident direction of the vapor-deposited particles 83...
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