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Remote analysis using aerosol sample transport

A sample transportation and aerosol technology, applied in the preparation of test samples, chemical analysis by combustion, material analysis, etc., can solve problems such as spikes, unreliable analysis results, false positive signals, etc.

Inactive Publication Date: 2005-09-28
ELEMENT SCI
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  • Summary
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Problems solved by technology

However, sometimes absorbed analytes will appear in the transport line and cause spurious positive signal spikes
For process monitoring or process control, this inaccuracy may render analytical results unreliable
Furthermore, methods and systems that transport multiple samples to local nebulizers associated with a single analyzer may introduce unwanted chemical interactions between samples when samples to be analyzed are sent to the shared nebulizer at different times. reaction

Method used

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  • Remote analysis using aerosol sample transport
  • Remote analysis using aerosol sample transport
  • Remote analysis using aerosol sample transport

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Embodiment Construction

[0012] refer to figure 1 2, remote sampling systems 10 and 20 according to the present invention include the use of a remote nebulizer 106 to rapidly provide a sample in aerosol form to a central analyzer or detector 110, allowing the sample to be located at a considerable distance from the detector 110. distances, such as between different locations in a semiconductor manufacturing or petrochemical manufacturing enterprise.

[0013] An aerosol is a suspension of liquid droplets or solid particles in a gas. A wet aerosol is an aerosol comprising liquid droplets in the liquid phase. A dry aerosol is an aerosol in which there are substantially no suspended liquid droplets. Wet aerosols may also contain solid particles suspended in a dry gas. For example, a wet stream is a wet aerosol because it contains water droplets in liquid form. Dry aerosols can be produced by aerosolizing the sample at relatively low flow rates where the solvent exists essentially only in the gaseous s...

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Abstract

Systems and methods are disclosed that use a nebulizer (106) for remote aerosol generation and then transport the aerosol by way of, for example, an argon gas stream through tubing (154). By transporting the chemical to be analyzed in aerosol form, transport time is reduced from about thirty minutes to less than one minute, using a relatively small amount of sample, and enabling the accurate, remote analysis of a variety of chemicals, including relatively high pH chemicals.

Description

technical field [0001] The present invention relates to systems and methods for use in chemical analysis systems. More specifically, the present invention relates to remote sample analysis using aerosol sample transport. Background technique [0002] In industrial applications, it is useful to periodically sample chemicals in order to check for the presence of harmful impurities. For example, in the semiconductor manufacturing industry, cleaning liquids are used in various manufacturing processes to remove impurities on the surface of semiconductor wafers. During cleaning, contaminants enter the solution from sources that come into contact with the cleaning liquid, such as semiconductor wafers, or from operators of associated cleaning equipment, or due to damage to valves or storage containers. Furthermore, for some industrial applications, pure chemicals are required and it is useful to test the purity of chemicals by analyzing the chemicals. By way of another example, i...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/73G01N1/00G01N1/22G01N1/28G01N15/06
CPCG01N2001/2223G01N2015/0681G01N15/065Y10T436/25875Y10T436/117497G01N1/2202
Inventor D·维德林
Owner ELEMENT SCI
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