Method for correcting mask pattern
A graphics and mask technology, applied in the field of mask graphics correction method, can solve the problem of changing the correction amount
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Embodiment 1
[0056] In this embodiment, a method of deleting a depressed portion generated between corrected figures at the corners of figures due to line width correction will be described. Figure 6A shows the corner of a pattern with recesses to be masked according to the invention. Graph P1 in FIG. 6A includes the same 135-degree corners (portions surrounded by circles) as in FIG. 2 . Assume that the correction amounts of the correction patterns C1 and C2 on both sides of the 135-degree corner are different.
[0057] In order to cover the depressed portion D in FIG. 6A, first, the size of the pattern is enlarged by MAX (deviation) times as shown in FIG. 6B. Then, as shown in FIG. 6C, the edges of the pattern are shifted by MAX (deviation) in the vertical direction with respect to each edge. Temporary areas T1 and T2 are thus formed. The order of enlarging the size shown in FIG. 6B and moving the graphic edge shown in FIG. 6C can be reversed.
[0058] Next, as shown in FIG. 7A, the d...
Embodiment 2
[0064] The difference between this embodiment and Embodiment 1 is only the angle of the corners. Fig. 8A shows a corner of a pattern with recesses to be masked in this embodiment. The graph P2 of FIG. 8A includes a 90-degree corner (portion surrounded by a circle) as in FIG. 1 . Assume that the correction amounts of the correction patterns C1 and C2 on both sides of the 90-degree corner are different from each other.
[0065] In order to cover the depressed portion D in FIG. 8A, first, the size of the pattern is enlarged by MAX (deviation) times as shown in FIG. 8B. Then, as shown in FIG. 8C, the edges of the figure are shifted by MAX (bias) in the vertical direction with respect to each edge. Temporary areas T1 and T2 are thus formed. The order of enlarging the size shown in FIG. 8B and moving the graphic edge shown in FIG. 8C can be reversed.
[0066] Next, as shown in FIG. 9A, the difference Pd between the enlarged pattern in FIG. 8B and the entire temporary areas T1 an...
Embodiment 3
[0072] In this embodiment, a method of deleting a depressed portion generated between corrected figures at the corners of figures due to line width correction will be described. Fig. 11A shows a corner of a pattern with protrusions to be corrected according to the present invention.
[0073] In Figures 1 and 2, the corner of the figure is less than 180 degrees, but in this embodiment the opposite is true, the corner of the figure is 225 degrees as in Figure 3, ie more than 180 degrees. In this case, the correction figure can be said to be formed inside the 135-degree corner.
[0074]Also in this embodiment it is assumed that the correction amounts of the correction patterns C1 and C2 on both sides of the corner are different from each other. As shown in FIG. 11A, when the corner of the figure P3 exceeds 180 degrees, the correction figures at the corner of the figure overlap partially (circle-enclosed part).
[0075] In order to cover the depression D shown in FIG. 11A, first...
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