An apparatus and method for two-dimensional electron gas actuation and transduction for GAAS NEMS
What is Al technical title?
Al technical title is built by PatSnap Al team. It summarizes the technical point description of the patent document.
An electromechanical and dipole technology, applied in electrical components, circuits, semiconductor devices, etc.
Inactive Publication Date: 2005-12-28
CALIFORNIA INST OF TECH
View PDF2 Cites 19 Cited by
Summary
Abstract
Description
Claims
Application Information
AI Technical Summary
This helps you quickly interpret patents by identifying the three key elements:
Problems solved by technology
Method used
Benefits of technology
Problems solved by technology
[0024] The ultimate limit for displacement probing of bending and torsional resonators using magnetopotential switching
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more
Image
Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
Click on the blue label to locate the original text in one second.
Reading with bidirectional positioning of images and text.
Smart Image
Examples
Experimental program
Comparison scheme
Effect test
example
[0447] In the two-port example with magnetic potential drive, the drive circuit is similar to the one-port circuit of FIG. 37 . Figure 39 The detection circuit shown is completely isolated except for a small reactive coupling. The probing electrode can be modeled as an ideal AC voltage source in series with the electrode resistance. The AC source voltage V' is proportional to the voltage across the RLC parallel circuit or the motion of the sensor. Measure the current I in the circuit m Influence the drive circuit by adding a damping force to the equation of motion:
[0448] γ→γ′=γ+κBL e I m / m
[0449] where Le is the length of the probe electrode and κ is a geometric factor accounting for the two electrodes located at different positions in the structure. In the example of a straight beam with two parallel electrodes, L'=L, κ=1. The circuit for mechanical resonance is modified by adding a parallel resistor:
[0450] R d ...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more
PUM
Login to view more
Abstract
A double-clamped beam has an asymmetric piezoelectric layer within the beam, and a grid is located within submicron distances of the beam, forming a grid beam dipole. The cantilever beams were formed by etching with Cl2/He plasma, which were respectively input into the plasma chamber at a flow rate ratio of 1:9. The parametric amplifier consists of a NEMS signal beam driven at resonance and a pair of pump beams driven at twice the resonance to generate a modulated Lorentz force on the pump beam to perturb the spring constant of the signal beam. The bridge circuit provides two out-of-phase components of the excitation signal to the first and second NEMS beams in the first and second arms. A DC current is supplied to an AC-driven NEMS device to tune the resonant frequency. The analyzer includes multiple piezoresistive NEMS cantilevers with different resonant frequencies and multiple drive/sensing elements, or multiple beams interacting to form an optical diffraction grating, or multiple strain sensing NEMS cantilevers, each of which All respond to a different analyte, or include multiple piezoresistive NEMS cantilevers with different IR adsorbates.
Description
[0001] Related Patent Applications [0002] This invention is related to the following U.S. Provisional Patent Applications: Serial No. 60 / 379,536, filed May 7, 2002; Serial No. 60 / 379,542, filed May 7, 2002; Serial No. 60 / 379,544, filed May 7, 2002; Serial No. 60 / 379,535, filed May 7, 2002; Serial No. 60 / 379,546, filed May 7, 2002; Serial No. 60 / 379,644, filed May 7, 2002; Serial No. 60 / 379,713, filed May 7, 2002; Serial No. 60 / 379,709, filed May 7, 2002 Serial No. 60 / 379,685, filed on May 7, 2002; Serial No. 60 / 379,550, filed on May 7, 2002; Serial No. 60 / 379,551, filed on May 7, 2002 Filed May 7, 2002; Serial No. 60 / 379,617, filed October 17, 2002, the contents of which are incorporated herein by reference and claim priority under 35 USC 119. [0003] Co-pending patent application citations [0004] It should be clearly understood that this patent application incorporates by reference and in its entirety the following concurrently filed patent application, Serial No. (PAU....
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more
Application Information
Patent Timeline
Application Date:The date an application was filed.
Publication Date:The date a patent or application was officially published.
First Publication Date:The earliest publication date of a patent with the same application number.
Issue Date:Publication date of the patent grant document.
PCT Entry Date:The Entry date of PCT National Phase.
Estimated Expiry Date:The statutory expiry date of a patent right according to the Patent Law, and it is the longest term of protection that the patent right can achieve without the termination of the patent right due to other reasons(Term extension factor has been taken into account ).
Invalid Date:Actual expiry date is based on effective date or publication date of legal transaction data of invalid patent.
Login to view more 
Login to view more