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An apparatus and method for two-dimensional electron gas actuation and transduction for GAAS NEMS

An electromechanical and dipole technology, applied in electrical components, circuits, semiconductor devices, etc.

Inactive Publication Date: 2005-12-28
CALIFORNIA INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0024] The ultimate limit for displacement probing of bending and torsional resonators using magnetopotential switching

Method used

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  • An apparatus and method for two-dimensional electron gas actuation and transduction for GAAS NEMS
  • An apparatus and method for two-dimensional electron gas actuation and transduction for GAAS NEMS
  • An apparatus and method for two-dimensional electron gas actuation and transduction for GAAS NEMS

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example

[0447] In the two-port example with magnetic potential drive, the drive circuit is similar to the one-port circuit of FIG. 37 . Figure 39 The detection circuit shown is completely isolated except for a small reactive coupling. The probing electrode can be modeled as an ideal AC voltage source in series with the electrode resistance. The AC source voltage V' is proportional to the voltage across the RLC parallel circuit or the motion of the sensor. Measure the current I in the circuit m Influence the drive circuit by adding a damping force to the equation of motion:

[0448] γ→γ′=γ+κBL e I m / m

[0449] where Le is the length of the probe electrode and κ is a geometric factor accounting for the two electrodes located at different positions in the structure. In the example of a straight beam with two parallel electrodes, L'=L, κ=1. The circuit for mechanical resonance is modified by adding a parallel resistor:

[0450] R d ...

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Abstract

A double-clamped beam has an asymmetric piezoelectric layer within the beam, and a grid is located within submicron distances of the beam, forming a grid beam dipole. The cantilever beams were formed by etching with Cl2 / He plasma, which were respectively input into the plasma chamber at a flow rate ratio of 1:9. The parametric amplifier consists of a NEMS signal beam driven at resonance and a pair of pump beams driven at twice the resonance to generate a modulated Lorentz force on the pump beam to perturb the spring constant of the signal beam. The bridge circuit provides two out-of-phase components of the excitation signal to the first and second NEMS beams in the first and second arms. A DC current is supplied to an AC-driven NEMS device to tune the resonant frequency. The analyzer includes multiple piezoresistive NEMS cantilevers with different resonant frequencies and multiple drive / sensing elements, or multiple beams interacting to form an optical diffraction grating, or multiple strain sensing NEMS cantilevers, each of which All respond to a different analyte, or include multiple piezoresistive NEMS cantilevers with different IR adsorbates.

Description

[0001] Related Patent Applications [0002] This invention is related to the following U.S. Provisional Patent Applications: Serial No. 60 / 379,536, filed May 7, 2002; Serial No. 60 / 379,542, filed May 7, 2002; Serial No. 60 / 379,544, filed May 7, 2002; Serial No. 60 / 379,535, filed May 7, 2002; Serial No. 60 / 379,546, filed May 7, 2002; Serial No. 60 / 379,644, filed May 7, 2002; Serial No. 60 / 379,713, filed May 7, 2002; Serial No. 60 / 379,709, filed May 7, 2002 Serial No. 60 / 379,685, filed on May 7, 2002; Serial No. 60 / 379,550, filed on May 7, 2002; Serial No. 60 / 379,551, filed on May 7, 2002 Filed May 7, 2002; Serial No. 60 / 379,617, filed October 17, 2002, the contents of which are incorporated herein by reference and claim priority under 35 USC 119. [0003] Co-pending patent application citations [0004] It should be clearly understood that this patent application incorporates by reference and in its entirety the following concurrently filed patent application, Serial No. (PAU....

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/0328
Inventor 迈克尔·L.·鲁克斯卡米尔·L.·埃肯斯Y.·T.·杨X.·M.·H.·黄H.·X.·唐达里尔·A.·哈灵顿吉恩·卡赛杰西卡·L.·阿勒特
Owner CALIFORNIA INST OF TECH
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