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Production method for chip-form film-forming component

A manufacturing method and film-forming technology, applied in optical components, ion implantation plating, coatings, etc., can solve problems such as damage to multilayer films, failure to prevent cracking or chipping, residual internal stress, etc.

Inactive Publication Date: 2006-04-19
FUJINON SANO
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] As in the prior art described above, in the case of attaching a film along the entire surface of a large substrate in a state where each optical element is masked, the substrate has a certain thickness and the number of film layers is relatively small. Effective, but when the thickness of the substrate is relatively thin and the number of film layers is more than 100, internal stress still remains, and when the mask is removed, cracking or chipping cannot be prevented sometimes
In addition, although the mask is removed after film formation, there is also a problem that the multilayer film may be damaged during the mask removal operation.

Method used

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  • Production method for chip-form film-forming component
  • Production method for chip-form film-forming component
  • Production method for chip-form film-forming component

Examples

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Effect test

no. 1 approach

[0025] Hereinafter, a first embodiment of the present invention will be described with reference to the drawings. In the present embodiment, an optical member such as a wavelength selection filter or a polarizing plate produced by laminating a film on the front and back surfaces of an optical glass as a substrate will be described. However, the substrate of the present invention includes various substrates other than optical glass, and functions as components are not limited to those described above.

[0026] first, figure 1 The appearance of the thickened substrate 1 as a component material and the sheet-shaped film-forming component 2 as a product are shown. As can be seen from this figure, as indicated by the dotted line in this figure, the thickened substrate 1 has forming portions of sheet-like members in a matrix. As the sheet-like film-forming part 2 of the final product, on the first film-forming surface 11a of one side of the thin substrate 3 made of optical glass, ...

no. 2 approach

[0038] Next, a second embodiment of the present invention will be described. In the above-mentioned first embodiment, by forming the anti-reflection film 5 on the second film-forming surface 11b, films having mutually different optical functions can be formed on the first and second film-forming surfaces, but For example Figure 7 As shown, in addition to the first optical multilayer film 4, the second optical multilayer film 40 can also be formed on the second film formation surface 11b, and through these first optical multilayer film 4 and the second optical multilayer film 40 can obtain the desired optical characteristics. That is, the optical multilayer films formed on the front and back sides of the substrate cooperate to have predetermined optical characteristics. At this time, the second optical multilayer film must be molded to offset the residual stress of the first optical multilayer film 4 . For example, when the number of layers of the entire optical multilayer ...

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Abstract

To prevent a substrate and films from being deformed or damaged when a very large number of films are formed on a thin substrate. A multi-layer film block (4P) is formed on a thickness-increasing substrate (1) and is divided into first optical multi-layer films (4) with a lattice-form incision (C) made in the block (4P) so as to be formed into respective chip-form film-forming components (2), and the surface, opposite to the surface on which the first optical multi-layer films (4) are formed, of the substrate (1) is polished to a level short of causing a deformation or a damage. A second optical multi-layer film such as an anti-reflection film (5) is formed on the surface, opposite to the surface on which the first optical multi-layer films (4) are formed, of a polished substrate base material (11) so as to offset a stress by the films (4), and is cut.

Description

technical field [0001] The present invention relates to a method of manufacturing a sheet-shaped film-forming member that is cut and separated into required sizes after forming a film on both sides of a thin substrate made of optical glass, ceramics, metal, or resin. Background technique [0002] For example, optical functional components such as wavelength selection filters, polarizers, and optical rotators are provided in optical communication or optical information processing devices. These optical functional components are constituted by, for example, components in which an optical multilayer film is formed on the surface of optical glass. The optical multilayer film is sometimes formed on only one side of the optical glass, and another optical multilayer film such as an antireflection film or a semi-mirror is formed on the opposite side. Therefore, the film is generally attached to both sides of the optical glass. [0003] The above-mentioned optical element, such as a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/28C23C14/08C23C14/24G02B1/10G02B1/11
CPCG02B5/285G02B1/105G02B1/11G02B1/14
Inventor 栗原忠幸
Owner FUJINON SANO