Omnibearing self-aligning method for detector-optical fiber coupling

Abstract

A method for coupling detector on optical fiber in omni bearing self alignment way includes utilizing laser auxiliary corrosion technique to generate corrosion hole on back surface of semiconductor substrate for preparing round hole detector, inserting optical fiber in round hole for aligning optical fiber to front photosensitive surface of detector accurately so as to realize nonbearing self alignment couple of detector ¿C optical fiber.

Description

Technical field: [0001] The invention belongs to the technical field of optoelectronics, and in particular relates to the technical field of realizing detector-fiber coupling. Background technique: [0002] Detector-fiber coupling technology is the key technology for making pigtailed detectors. The purpose is to realize precise coupling between the detector and the optical fiber, improve its coupling efficiency, and thus improve the overall performance of the detector. [0003] Due to its unique advantages in capacity and anti-interference ability, optical fiber systems have been or will be widely used in communications, aerospace, ultra-high-speed computers and other fields. In the optical fiber system, since the photosensitive surface of the detector and the cross section of the fiber core are very small (on the order of 10 microns or even microns), it is very difficult to precisely align and cure each other. Good coupling between the detector and the fiber and its low-co...

AI Technical Summary

Problems solved by technology

This is a time consuming and costly process, and any small deviation of the core relative to the photodetector active area during curing and after packaging introduces significant coupling losses

In short, in addition to the problem of low coupling efficiency, the existing technologies and methods also have the following disadvantages: 1) The manufacturing process is complicated, and the requirements for equipment are relatively high, and they will encounter great problems when they are applied in actual production. obstacles

2) High requirements on the operating environment and production technology, resulting in high instability when put into production

3) There are still many steps in the production process, and there is a bottleneck in improving the one-time production pass rate of the product

However, although Indian scholars proposed the concept of self-alignment, they only used a conventional wet chemical etching process. Only V-shaped grooves 2 were made on the semiconductor substrate material 1, and the ridges perpendicular to the V-shaped grooves 2 Directly inserting the optical fiber 3 to realize one-dimensional self-alignment, but cannot realize all-round automatic and precise positioning, such as figure 1 shown

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