Electrostatic force driven apparatus for testing resonant one-way flexural-tensile fatigue of microstructure

A technology of bending fatigue and test equipment, which is applied in the field of basic research of micro-nano technology, can solve the problems of impossible completion, difficulty in clamping and centering micron-sized samples, and achieve easy processing, high practical value, and large vibration amplitude. Effect

Inactive Publication Date: 2006-06-21
BEIJING UNIV OF TECH
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Problems solved by technology

However, this method is not suitable for the study of MEMS fatigue characteristics. First, the driving methods of hydraulic pressure and electromagnetic force are not suitable for the state of micron size. impossible to complete

Method used

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  • Electrostatic force driven apparatus for testing resonant one-way flexural-tensile fatigue of microstructure
  • Electrostatic force driven apparatus for testing resonant one-way flexural-tensile fatigue of microstructure
  • Electrostatic force driven apparatus for testing resonant one-way flexural-tensile fatigue of microstructure

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Embodiment Construction

[0024] Specific embodiments of the present invention are described below in conjunction with accompanying drawing:

[0025] The structural diagram of the microstructure unidirectional bending fatigue test device designed according to the idea of ​​this technical scheme can be found in figure 1 , figure 2 , image 3 . figure 1 is the frontal global map, figure 2 It is a partial enlarged view of the microstructure unidirectional bending fatigue test device, image 3 It is a cross-sectional view of the electrode structure, and its maximum characteristic size is about 300 μm. Among them, 1 and 2 are electrodes, and each electrode is covered with a layer of metal called metal layer 9. The purpose is to enhance conductivity. Below the metal layer is a polysilicon structure layer 10, and the entire electrode is fixed on the silicon wafer by the bottom anchor layer 11. on the base. 3 and 4 are a pair of comb teeth, connected to electrodes 1 and 2 through side arms 8 and 7 resp...

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Abstract

The invention discloses a unidirectional bending fatigue test device of microstructure resonance based on driving electrostatic force, which is characterized by the following: the lateral wall of fixing comb connects the AC electrode; the hung comb connects the ground electrode through the connection bridge and fixing block on the base, which interlaces the fixing comb; one end of connection bridge is the middle point of connection arm of hung comb; the other end is fixed on the lateral arm of base through anchor layer; the connection bridge is the fatigue sample. The invention contains broader comb without relative rotation between hung and fixing comb, which avoids the interference of two combs to generate more vibration amplitude.

Description

technical field [0001] The invention is used for the research on the fatigue characteristics of polysilicon, a structural material of MEMS (Micro-Electro-Mechanical System, micro-electro-mechanical system), and belongs to the field of basic research of micro-nano technology. Background technique [0002] MEMS (Micro Electromechanical System) refers to a micro-electromechanical system that integrates micro-sensors, actuators, signal processing and control circuits, interface circuits, communications and power supplies. To sum up, MEMS has the following basic characteristics, miniaturization, intelligence, multi-function, high integration and suitable for mass production. The goal of MEMS technology is to explore components and systems with new principles and new functions through the miniaturization and integration of the system. MEMS technology is a typical multidisciplinary cutting-edge research field, involving almost all fields of natural and engineering sciences, such a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N3/38
Inventor 丁雷尚德广贾冠华孙国芹李浩群
Owner BEIJING UNIV OF TECH
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