PSD type Hartmann-Sheck wave front sensor based on microprism array

A microprism and sensor technology, applied in instruments, scientific instruments, measuring devices, etc., can solve the problems of difficult coupling between lens arrays and photodetectors, the influence of focal length errors of lens array units, and the large amount of data transmission calculations, so as to improve wave efficiency. Pre-detection accuracy, simplified installation and adjustment, and the effect of saving hardware resources

Inactive Publication Date: 2006-07-05
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology

[0018] The main purpose of the present invention is: for the low sampling rate in the existing Hartmann technology described above, the large amount of calculation of data transmission, and (micro) lens array and photodetector coupling difficulty, the unit focal length of (micro) lens array Error inconsistency affects sensor accuracy and other issues, and a new system structure is designed. This structure is simple, the sampling speed is high, and it is suitable for mass production.

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  • PSD type Hartmann-Sheck wave front sensor based on microprism array
  • PSD type Hartmann-Sheck wave front sensor based on microprism array
  • PSD type Hartmann-Sheck wave front sensor based on microprism array

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Embodiment Construction

[0043] Such as Figure 4 As shown, the present invention is made up of microprism array 1, converging lens 2, position sensitive detector (PSD) array 3 and data acquisition and wavefront reconstruction unit 4, and converging lens 2 is close to the back of microprism array 1, and The microprism array 1 is combined to divide the pupil of the system, and the position sensitive detector PSD array 3 is placed on the focal plane of the converging lens 2, and its output is processed by the data acquisition and wavefront reconstruction unit 4 to reconstruct the wavefront, wherein the microprism Array 1 is an array composed of prisms with different wedge angles (such as Figure 8As shown), the micro-prism array of the micro-relief zigzag phase grating structure can be processed by binary optical technology, and the micro-prism array of continuous surface shape can also be processed by micro-optical technology. For the specific structure, please refer to the patent of Wang Haiying et al....

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Abstract

The invention is a PSD Hartmann-Shack wavefront sensor based on microprism array, characterized in comprising microprism array, focusing lens, position sensitive detector (PSD) array, and data collecting and wavefront reconstructing unit, where the microprism array and the focusing lens clinging to the microprism array combinedly divide the system pupil, the PSD array is arranged on the focal plane of the focusing lens and the output of the PSD array is connected to the data collecting and wavefront reconstructing unit. The invention can overcome the problem of inconsistent focuses of all cells of the microlens array. The invention largely raises the sampling speed and omits the software-based calculating course, simple and largely reducing the follow-up processing burden. And the system is simple in structure and easy to manufacture and implement and batch production.

Description

technical field [0001] The invention is a PSD type Hartmann-Shack wavefront sensor based on microprism array, which adopts the Terman-Shack wavefront sensor with special structure of microprism array, converging lens and PSD array. technical background [0002] The Hartmann-Shack wavefront sensor is currently the most commonly used wavefront sensor in adaptive optics systems. Compared with the interferometer, it has the characteristics of high light energy utilization rate, no moving parts, and low environmental requirements. With the continuous improvement of the structure of the Hartmann-Shack wavefront sensor and various components, its application fields are becoming wider and wider. [0003] Generally, the traditional Hartmann-Shack wavefront sensor mainly uses a microlens array to divide the incident beam into sub-beams, and uses a CCD camera as a photodetector to obtain the image of the sub-aperture spot, and then extracts the position signal from the image using the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01J9/00G01J1/00G02B27/26G01M11/02G02B30/25
Inventor 陈凯王海英张雨东
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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