Hartmann wavefront sensor based on unit photo-sensitive detector array

Abstract

The invention discloses a hartmann wavefront sensor based on a unit photo-sensitive detector array. The hartmann wavefront sensor consists of a phase spatial light modulator, a microlens array, a single-mode fiber array and the unit photo-sensitive detector array, wherein the front two-order binary phase modulation is carried out on sub-light waves in each sub-aperture of the hartmann wavefront sensor by the phase spatial light modulator at the same time; the modulated sub-light waves are respectively coupled into the single-mode fiber array of a focal plane to achieve mode selection filtering after the micro-lens array is arranged on the phase modulator, and the light intensity after the mode selection filtering is received by the unit photo-sensitive detector array; and wavefront slope information inside each sub-aperture is solved by processing light intensity data, and finally an incident light wave wavefront is rebuilt by using a hartmann wavefront sensor wavefront mode recovery algorithm. According to the hartmann wavefront sensor based on the unit photo-sensitive detector array, the quantity of probe units is reduced, and the problem of decreasing of wavefront measurement accuracy caused by facula discrete sampling is avoided, so that the wavefront measurement accuracy is not affected by decreasing of the quantity of the probe units, and the hartmann wavefront sensor can be applied to the field of high-speed and high-precision wavefront detection.

Description

technical field [0001] The invention belongs to the technical field of optical information measurement, and relates to a device for measuring the wavefront of an incident light beam, in particular to a novel Hartmann wavefront sensor based on a unit photosensitive detector array. Background technique [0002] Wavefront sensing technology belongs to the category of measurement technology and has been widely used in adaptive optics, astronomy, medical imaging, laser communication, optical detection and many other fields. At present, a variety of wavefront sensing technologies have been applied in practice, such as shear interference wavefront sensing technology, Hartmann wavefront sensing technology, curvature wavefront sensing technology and various phase inversion methods, etc. Among them, the shearing interference wavefront sensing technology is a classic wavefront aberration measurement method, and its measurement accuracy is very high, but its structure is complex, it req...

AI Technical Summary

Problems solved by technology

However, under the framework of measuring the offset of the center of mass of the spot to restore the wavefront, in order to measure the offset of each spot in two directions, the detection unit array of the 2×2 array is close to the theoretical limit, and it is difficult to continue to reduce. Therefore, it is impossible to use a simple, reliable, and better-performing unit photosensitive detector as an optical information detection element.

In addition, the method of increasing the detection speed by reducing the adoption rate of the spot array is at the expense of the detection accuracy and dynamic range of the Hartmann wavefront sensor, which is very limited in practical applications

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