Cellular automation method for simulating anisotropic silicon-etching process
A cellular automaton and corrosion process technology, applied in the process of producing decorative surface effects, decorative arts, gaseous chemical plating, etc., can solve the problems of complex boundary conditions, difficult to introduce high Miller index crystal planes, etc. Accurate simulation, fast simulation speed, fast and accurate simulation effect
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Example Embodiment
[0025] In the present invention, the lattice structure of silicon dioxide is used as the lattice structure of the cellular automaton, as attached figure 1 Shown. By introducing more crystal planes that often appear in the anisotropic etching process of silicon on the surface of the substrate, and the crystal planes appearing during the cell etching process of the surface of the substrate affect the etching process of the internal cells of the silicon substrate. It can effectively introduce high Miller index crystal planes and effectively simplify the boundary conditions. This method satisfies the following two conditions:
[0026] a. The lattice structure of silicon is used as the lattice structure of the cellular automaton. By introducing more silicon into the surface of the substrate, crystal planes that often appear during the anisotropic etching process, and appearing during the cellular etching process of the substrate surface The crystal plane affects the corrosion process ...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap