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67results about How to "Simulation speed" patented technology

Fault simulation system and fault analysis method for single event upset

The invention relates to a fault simulation system and a fault analysis method for single event upset in a large scale integrated circuit SRAM-type FPGA (Field Programmable Gate Array). The fault simulation system comprises a host computer and a control board, wherein the control board comprises a fault injection module, a fault detecting module and a fault analyzing module. The fault simulation system and the fault analysis method provided by the invention are flexible to use, low in cost, high in simulation precision, fast in simulation speed and free from any physical damage to a chip.
Owner:NORTHWEST INST OF NUCLEAR TECH

Power distribution system probability reliability assessing method based on analytical method

The invention discloses a power distribution system probability reliability assessing method based on an analytical method. The method comprises the steps that a given power distribution network is partitioned into a fault area, an isolation area, a gapless island area and an influence-free area are classified, a fault mode impact analysis sheet base is established, and parameters are initialized; a stimulation clock is initialized, a random number is generated, the minimum non-failure operation time is obtained according to failure rate parameters of all element state models, the fault isolation time and the load band transferring time are worked out, and the stimulation clock is pushed; the fault mode impact analysis sheet base is inquired, classifications of all cells are determined, whether an island is formed or not is judged, and different methods are adopted for processing the island area and the non-island area; the state sample of an energy storage device is established according to the energy storage device electrical charge state probability distribution obtained through the probability reliability calculating method; distribution probabilities of single-time fault indexes of load points are overlapped, and the probability reliability indexes of the loads and the system are calculated. The simulation speed is increased while certain calculation precision is ensured, and the power grid situation is comprehensively reflected.
Owner:STATE GRID CORP OF CHINA +3

Dynamic parameter calibration device of optical tracking/sighting pointing system and use method of dynamic parameter calibration device

The invention belongs to the parameter calibration technical field and relates to a dynamic parameter calibration device of an optical tracking / sighting pointing system and a use method of the dynamic parameter calibration device. The objective of the invention is to solve the problem that an optical tracking / sighting pointing system cannot be calibrated in the prior art. The device comprises a carrier attitude simulation system (1) and a target simulator (2); equipment to be tested (3) is mounted on the carrier attitude simulation system (1); the carrier attitude simulation system (1) simulates six-degree-of-freedom motion in a three-dimensional space and reproduces the attitude change of a carrier; and the target simulator (2) is mounted on a platform at a certain height, and is spaced by a certain distance, and simulates the movement trajectory of the movement of a target. The method includes the steps of stabilization accuracy calibration and tracking accuracy calibration. According to the dynamic parameter calibration device of the invention, the carrier attitude simulation system is adopted to simulate six-degree-of-freedom motion in the three-dimensional space, and can simulate the use environments of the system under vehicle-mounted, ship-based, airborne and ground-based conditions to the greatest extent.
Owner:BEIJING AEROSPACE INST FOR METROLOGY & MEASUREMENT TECH +1

Efficient non-stationary random process simulation method

The invention belongs to the field of random signal simulation, in particular to an efficient non-stationary random process simulation method. The simulation method is a spectral representation simulation method adopting fast fourier transform (FFT) based on proper orthogonal decomposition (POD) and comprises the following steps: firstly performing Cholesky decomposition on an evolutionary power spectrum matrix, then representing a decomposed time-varying spectrum as the sum of products of a plurality of time functions and frequency functions by adapting the proper orthogonal decomposition, decoupling a time-varying power spectrum and finally greatly improving the simulation efficiency by utilizing a FFT technology. When the efficient non-stationary random process simulation method is adopted for stimulating a non-stationary random process, the POD precision and the reconstruction precision are high, and the goodness of fit of a statistical correlation function for simulating a sample duration with a target correlation function is high; by the use of the FFT, the simulation speed of a sample is obviously improved; the efficient non-stationary random process simulation method effectively solves the problem of low calculation efficiency caused by the fact that a traditional non-stationary random process simulation method based on spectral representation cannot use the FFT and has the advantages of high efficiency, high precision and high easiness in use.
Owner:黄国庆

Functional simulator for reconfigurable dedicated processor core

The invention relates to a functional simulator for a reconfigurable dedicated processor core. The functional simulator comprises an external interface module, a control module and a calculation realization module, wherein the external interface module simulates functions of an internal register set and an internal SRAM of the reconfigurable dedicated processor core, receives a configuration instruction required to be simulated, analyzes obtained task information according to the configuration instruction, and writes the task information into a global task queue; the control module simulates a function of an internal main controller of the reconfigurable dedicated processor core, transmits the task information among modules according to the task queue, obtains a calculation task required to be executed currently and a calculation task that is about to be executed from the task queue, and calls the calculation realization module to execute the calculation tasks; and the calculation realization module executes a plurality of algorithms to output calculation result data and calculation states, and executes the transportation of the task information and the calculation result data. The functional simulator has the beneficial effects of higher simulation speed, convenience for system-level debugging and optimization, and favorability for improving the efficiency and reducing the cost.
Owner:NANJING UNIV

Observation point and concurrence based fault injection simulation method and device

The invention relates to an observation point and concurrence based fault injection simulation method and device, and belongs to the field of integrated circuit fault injection simulation methods. In order to solve a defect that a fault injection simulation method in the prior art is too long in simulation time because of adoption of a single observation point and a single process, the invention provides an observation point and concurrence based fault injection simulation method. The method comprises the steps of acquiring test data from description codes of a target circuit; setting fault injection parameters; setting a preset number of observation points in allusion to the test data, performing fault injection by adopting a concurrent mode, and generating an output file; detecting whether the target circuit operates normally or not at the next observation point after each period of fault injection, if so, performing the next period of injection, and if not, turning back to the previous observation point to start the next period of fault injection; and analyzing the output file to acquire a fault analysis result. The invention further comprises an observation point and concurrence based fault injection simulation device. The method and device provided by the invention can applicable to radiation resistance performance evaluation for integrated circuits.
Owner:HARBIN INST OF TECH

Multi-core simulation parallel accelerating method based on sampling

The invention provides a multi-core simulation parallel accelerating method based on sampling. The method includes the steps of S1, selecting a multithread application program as a multi-core benchmark test program; S2, adopting a sampling strategy to the selected multithread application program to acquire an instruction stream sample fragment of each thread; S3, operating the instruction stream sample fragment, acquired in S2, of each thread in a dynamic code analyzing module of a simulator, and segmenting the instruction stream sample fragment of each thread into multiple dispersing segments according to segmenting points; S4, grouping the multiple dispersing segments according to different segmenting points during segmenting; S5, operating the dispersing segments grouped in S4 in corresponding segment simulating modules to obtain simulation time needed for operating the dispersing segments; and S6, sum up all simulation time output by the segment simulating modules in S5 to obtain total time of the multithread application program in S1. Simulation speed is increased evidently, and evaluation cycle is shortened.
Owner:SHENZHEN INST OF ADVANCED TECH CHINESE ACAD OF SCI

Synthetic aperture radar echo simulator and echo simulation processing method

The invention belongs to the field of the radar signal processing technology and discloses a synthetic aperture radar echo simulator and an echo simulation processing method. The simulator comprises an FPGA (field programmable gate array) chip, a DDR (double data rate), a power module, an upper computer, a network interface module, a D / A (digital to analog) module, a high-speed interface module and a data logger. The simulation method includes the steps of configuration parameter writing, full scene equivalent scattering coefficient determination, system impact response component determination and time-frequency transformation, time-frequency transformation of emission signals, inverse time-frequency transformation processing, small scene or large scene echo signal output and large scene echo signal playback. The single FPGA chip, the DDR and the data logger are only adopted for the main structure, the echo simulation process is achieved by the aid of assembly line work, and the synthetic aperture radar echo simulator has the advantages of simple system structure, high reliability, capabilities of effectively increasing the simulation speed of SAR (synthetic aperture radar) small scene echo signals, achieving real-time simulation of small scene echoes and being used for large scene echo signal simulation and echo signal playback and output, and the like.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA

Wind power prediction method based on historical meteorological data and stochastic simulation

ActiveCN108428015AImprove accuracyEasy to trainForecastingElectricityLibrary training
The invention relates to a wind power prediction method based on historical meteorological data and stochastic simulation. The method comprises the following steps of a pattern library training step based on the historical meteorological data: constructing training images according to the historical meteorological data, and capturing data events of the training images to establish a training imagemodel library; a wind power prediction step based on the stochastic simulation: establishing a wind power prediction region, and using the training image model library for traversing unknown nodes inthe wind power prediction region to obtain a wind power prediction result. Compared with the prior art, the method has the advantages of high prediction accuracy, small calculation amount, wide application in the field of wind power generation and the like.
Owner:SHANGHAI UNIVERSITY OF ELECTRIC POWER

Shared-Variable-Based (SVB) Synchronization Approach for Multi-Core Simulation

The present invention discloses a shared-variable-based (SVB) approach for fast and accurate multi-core cache coherence simulation. While the intuitive, conventional approach, synchronizing at either every cycle or memory access, gives accurate simulation results, it has poor performance due to huge simulation overloads. In the present invention, timing synchronization is only needed before shared variable accesses in order to maintain accuracy while improving the efficiency in the proposed shared-variable-based approach.
Owner:NATIONAL TSING HUA UNIVERSITY

Multi-core processor simulation method and apparatus

The invention provides a multi-core processor simulation method and apparatus. The method comprises: performing simulation at a field programmable gate array (FPGA) to generate a target processor core and a shared functional part; and according to an application run by the target processor core in the FPGA, performing simulation to generate at least one false processor core accessing the shared functional part together with the target processor core, wherein the false processor cores are used for generating access requests of accessing the shared functional part, so that the target processor core, the shared functional part and the false processor cores form a multi-core processor. With the adoption of the technical scheme provided by embodiments of the invention, the complexity of simulating the multi-core processor can be lowered and the simulation speed is increased.
Owner:LOONGSON TECH CORP

Memory space simulation method for embedded processor

A memory space simulation method for an embedded processor is provided. The method can simulate the complete memory space of the embedded processor and simulate the complete memory space with a large capacity by adopting a paging mode, and only simulates an actually used part of the memory space in a program under a paging mechanism so as to save space expenditure required by the simulation. The memory space simulation method for the embedded processor adopts a mixed simulation method combining static simulation and dynamic simulation according to different address ranges and achieves the memory space simulation mechanism with a large capacity which is high in efficiency and low in expenditure.
Owner:BEIJING INST OF CONTROL ENG

Device, system and method for simulating anti-collision radar target speed based on phase modulation mode

The invention discloses a device, system and method for simulating an anti-collision radar target speed based on a phase modulation mode. The device comprises a FPGA phase modulation unit, a DAC and filter unit and a single side band modulation unit, the FPGA phase modulation unit receives a phase control word sent by a host, generates sine and cosine two-way signals with different phases under the action of an external trigger signal, and sends the sine and cosine two-way signals to the DAC and filter unit; the DAC and filter unit convert the sine and cosine two-way digital signals into sineand cosine two-way analog signals, filter the two-way analog signals respectively, and send the filtered sine and cosine two-way analog signals to the single side band modulation unit; and the singleside band modulation unit receives a signal sent by an anti-collision radar as a zero-delay local oscillation signal, carries out IQ frequency mixing on the sine analog signal and the cosine analog signal and the zero-delay local oscillation signal respectively to obtain a final output frequency, and the final output frequency is sent to the input end of a transmitting channel of a simulator.
Owner:CHINA ELECTRONIS TECH INSTR CO LTD

City evolvement simulation implementing method based on paralleling elementary cell automatic machine

The invention provides an urban geography evolution simulation realizing method based on a parallel cellular automaton, which adopts the cellular automaton to simulate urban geographical phenomena, decomposes a cellular space into a plurality of subdomains, distributes every subdomain on every distributed processor for processing, and finally combines operation results of all the processors into a final simulation result. The urban geography evolution simulation realizing method based on the parallel cellular automaton overcomes the defects in the prior art, provides a parallel operational urban CA, solves the problem of speed bottleneck of the urban CA through network interconnected computer join operation, and achieves the aim of high-efficiency space calculation.
Owner:SUN YAT SEN UNIV

Cellular automation method for simulating anisotropic silicon-etching process

The cellular automaton method for simulating anisotropic silicon-etching process meets the following two conditions. The first condition is to adopt the crystal lattice structure of silicon as that of cellular automaton, introduce more crystal face appeared in the anisotropic silicon-etching process to the substrate surface layer and affect the etching process of inner substrate cells with the crystal face appeared in the surface substrate layer cell etching process. The second condition is that the determination of the surface layer cell boundary condition during the surface substrate layer cell etching process depends only on the surface layer cells, resulting in reduced considered cell number, high precision and fast simulating speed. The present invention has the advantages of fast operation speed and high precision and possesses practical significance in realizing the fast precise simulation of anisotropic silicon-etching process.
Owner:SOUTHEAST UNIV

Method for building simulation model of rock core scale

The invention discloses a method for building a simulation model of a rock core scale. The method comprises the steps of 1, measuring the porosity and the test permeability of a target rock core through experiments; 2, acquiring the pore radius probability distribution of the target rock core based on a mercury injection experiment; 3, building a permeability calculation model, and acquiring the permeability distribution; 4, based on permeability anisotropy parameters, building the simulation model of the rock core scale; 5, calculating the apparent permeability according to the simulation model of the rock core scale; and 6, calculating an error rate of the visual permeability and the test permeability, and when the error rate is smaller than a set error rate, acquiring the simulation model of the rock core scale, otherwise, repeating the steps 3-6, until the error rate is smaller than the set error rate, and acquiring the simulation model of the rock core scale at the moment. The method has the advantages that based on the anisotropy of the permeability, the non-homogeneity and anisotropy characteristics of a rock core can be truly reflected; the simulation model can simulate a flowing mechanism on a large scale; and the simulation speed is higher.
Owner:CHINA PETROLEUM & CHEM CORP +1

Structure-irrelevant micro-processor verification and evaluation method

This invention relates to a checking and evaluating method about structure independency micro processing unit (abbreviation THUMPSim), which belongs to the micro processing unit chip checking and evaluating technique field. It is a micro processing unit simulative and checking method which is independent of system structure describing the simulative micro processing unit by facing part structure independency system structure defined method and processing simulated drive by event driven signal renewal arithmetic.
Owner:TSINGHUA UNIV

Kinematic model based jamming bomb simulation method

The invention discloses a kinematic model based jamming bomb simulation method. The kinematic model based jamming bomb simulation method comprises the following steps of 1 determining launching direction; 2 determining launching speed; 3 determining a launching track; 4 determining ignition time; 5 rendering a bomb head of a jamming bomb; 6 rendering a trail of an infected bomb; 7 generating animation. According to the kinematic model based jamming bomb simulation method, a three-time Bezier curve is used for simulating continuous motion of the jamming bomb, and the problem that motion trails of a segmented model are not continuous is effectively solved. In the kinematic model based jamming bomb simulation method, a kinetic factor is considered, motion randomness is further increased, the motion speed of the jamming bomb is randomized at certain standard, the launching direction is random, and the problem of single models is effectively solved. The kinematic model based jamming bomb simulation method is high in simulation speed, real in effect and more flexible in parameter setting.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA

A simulation method and system for gas flow in multi-scale cracks of a shale gas reservoir

The invention discloses a simulation method and system for gas flow in a multi-scale crack of a shale gas reservoir. The method comprises the following steps of preparing and processing data; establishing an equivalent medium model according to the secondary fracture grid of the shale gas reservoir, and taking the equivalent medium model as a background grid; establishing a discrete fracture modelaccording to the large-scale artificial hydraulic fracture, and embedding the discrete fracture model into the background grid; determining adjacent connections between the background grids, all non-adjacent connections between the background grids and the discrete fracture model and all non-adjacent connections in the discrete fracture model, and further establishing a double-medium model; and performing numerical simulation based on the double-medium model. According to the simulation method for gas flow in the multi-scale cracks of the shale gas reservoir in combination with the discrete crack model and the equivalent medium model, numerical simulation of the shale gas reservoir can be more accurately carried out, the productivity of a shale gas well is accurately predicted, and a foundation is laid for adjustment of a subsequent development scheme.
Owner:CHINA PETROLEUM & CHEM CORP +1

High speed simulation method of ion implantation including dose effect

The high-speed ion implantation simulating method including dosage effect combines the splitting method and dosage effect and is specifically to simulate alternate implantation of virtual ion and true ion until finishing the implantation of all true ions. In the only once simulation, implanted ions are divided into true ions and virtual ions artificially, the true ions are used to simulate cascade collision to produce defect distribution during the implantation; and the virtual ions are used to simulate range distribution. The said simulation method can simulate well the range distribution with experiment result coinciding with SIMS, and has high precision, high speed and high effect of simulation. The introduced defect production produces defect distribution capable of being used in subsequent annealing simulation for ultimate realization of technological simulation.
Owner:PEKING UNIV +1

Heat transfer analysis model for medium-deep layer buried pipe heat exchanger

The invention discloses a heat transfer analysis model based on a ground heat exchanger. The heat transfer analysis model comprises the following steps: S1, acquiring analysis parameters; s2, determining operation conditions according to the analysis parameters; and S3, heat transfer analysis is conducted on the middle-deep layer buried pipe heat exchanger based on the determined working conditions, specifically, under the heat taking working condition and the heat storage working condition, the heat transfer process outside the drilled hole of the middle-deep layer buried pipe heat exchanger is analyzed based on the heat front surface propagation rule, and heat transfer in the drilled hole is analyzed based on a one-dimensional quasi-steady-state heat transfer model. And coupling with the heat transfer process outside the drill hole through the temperature of the drill hole wall and the heat flow boundary condition. According to the model, various parameters adopted in actual engineering are used as input numbers based on an underground rock heat transfer rule, so that the problem of huge calculation scale or incapability of effectively implementing actual engineering problems caused by an overlarge pipe length-pipe diameter ratio of a middle-deep layer heat exchanger in a traditional grid division numerical method is solved; rapid analysis of the heat transfer process of the medium-deep layer buried heat exchanger with the ultra-large pipe length-pipe diameter ratio under any working conditions (including heat removal, heat storage and intermittent working conditions) is achieved.
Owner:ZHEJIANG LUTE ENERGY TECH +1

Light intensity distribution analogy method of heavy-rubber ultraviolet light oblique incidence back etching process

The invention relates to a light intensity distribution analogy method of a heavy-rubber ultraviolet light oblique incidence back etching process, which aims to solve the problem that the traditional light intensity distribution analogy method based on a scalar diffraction theory can not simulate the light intensity distribution of an SU-8 rubber ultraviolet light oblique incidence back etching process currently. A method which meets the following two conditions can be regarded as the light intensity distribution analogy method of the SU-8 rubber ultraviolet light oblique incidence back etching process: a. a paraxial approximation technology with ultraviolet light oblique incidence is used to process a Fresnel-Kirchhoff diffraction integral equation based on the scalar diffraction theory and a light intensity computation model suitable to the SU-8 rubber ultraviolet light oblique incidence back etching process is put forward; and b. the light intensity computation model of back oblique incidence ultraviolet light comprehensively considers the reflection and refraction of the back oblique incidence ultraviolet light in air / mask plate, mask plate / SU-8 rubber interface, decay of the back oblique incidence ultraviolet light in SU-8 rubber and other factors, and precisely simulates the light intensity distribution of the SU-8 rubber ultraviolet light oblique incidence back etching process.
Owner:SOUTHEAST UNIV

Formation pressure prediction method based on stochastic simulation

The invention relates to a formation pressure prediction method based on stochastic simulation. The method comprises the steps that according to an information entropy theory, the optimum size of a data template is determined, and the data template is utilized to scan a training image of formation pressure and extract pattern features of the training image; dimensionality reduction is carried outon the pattern through principal component analysis or multidimensional transformation, a k-means algorithm is utilized for classification, a mean value of categorical data is acquired and is taken asa representative mean value of the category, the known formation pressure data is compared with the above mean value to obtain differences, and formation pressure data in a category with the minimumdifference is taken as a predicted value. Compared with the prior art, the method can effectively achieve the formation pressure data prediction, and the predication speed and quality can be improved.
Owner:SHANGHAI UNIVERSITY OF ELECTRIC POWER

Refined simulation method and system for wind speed field of mountain terrain

The invention discloses a refined simulation method and system for a wind speed field of mountainous terrain. The method comprises the steps that a mountain is simplified into a semi-ellipsoid structure capable of being described in a parameterized mode, and a three-dimensional calculation model is established; establishing a cuboid computational domain according to the size of the three-dimensional calculation model of the mountain; applying a wind speed conforming to an exponential distribution rule to an inlet plane of the cuboid computational domain through a turbulence model; and observing the spatial distribution condition of the wind speed field in the cuboid computational domain, extracting wind direction angles and wind speeds at different coordinates, searching the relation between the wind speed field and the mountain terrain parameters, and performing fitting by using a mathematical formula. The method can be used for analyzing the influence of mountain topography on the wind speed compared with plain topography, and by utilizing the advantage that the wind speed distinction degree of the near-ground position of the mountain is higher, the negative influence of pressure and vortex force generated by local wind speed on capital construction projects built in the mountainous area can be researched; non-linear function fitting related to wind speed field data also provides a reference for mathematical quantization of complex terrain wind field numerical simulation.
Owner:国网陕西省电力有限公司经济技术研究院 +1

A fabric simulation method based on yarn model

The invention relates to a fabric simulation method based on a yarn model, and provides a discretization modeling method of woven fabric, and the expression of the internal force and the external force of the model fabric is given when the force analysis is carried out. In the aspect of model representation, the continuous yarn model is adopted, and its quality is continuously distributed on the yarn, which is more consistent with the real fabric. Aiming at the possible superelasticity problem in fabric simulation, the corresponding solution is given. By combining the deformation constraint with the motion equation, the deformation constraint can be solved in the process of motion integration without modifying the physical simulation model, and good simulation results can be obtained. Themethod comprises the following steps that (1) the discrete modeling is carried out on the fabric based on the structural characteristics of the fabric; (2) based on Lagrange kinetic equation, the internal and external forces acting on the fabric are analyzed; (3) Semi-implicit integration scheme is used to integrate fabric motion, and the purpose of dynamic simulation is realized; (4) the deformation of the fabric is restrained.
Owner:BEIHANG UNIV

Application method, device and system of EFDC model based on cloud computing

The invention provides an application method, device and system of an EFDC model based on cloud computing and a medium. The method comprises the following steps: extracting an EFDC model grid; obtaining a water body drainage basin range; drawing a visual layer; obtaining input data, and processing the input data; importing the processed data into an EFDC model; allocating a cloud server to the EFDC model; and obtaining calculation result data, and associating the calculation result data to the visual layer. According to the scheme provided by the invention, the interface operation is simple and convenient, and a user does not need to master the input format requirement of the EFDC model on the data; multiple groups of input data can be subjected to concurrent simulation at the same time, and the simulation speed is high.
Owner:北京思路创新科技有限公司

Simulation method and device for interventional embolization operation process

The invention discloses a simulation method and device for the interventional embolization operation process. The method comprises the steps that according to the geometrical shape of an embolic substance bounding sphere, a winding path formula of embolic substances is established in a polar coordinate system; an angioma is selected, a network adjacency information based search algorithm is adopted, corresponding boundary conditions are set, all triangular patches belonging to the angioma are separated out, and the ball center and radius of an inscribed sphere of the angioma are calculated; a catheter is controlled to reach the angioma, and the embolic substances are pushed into the angioma through the catheter according to the winding path formula of the embolic substances and the ball center and radius of the inscribed sphere of the angioma. Accordingly, the simulation truth of interventional embolic substance winding can be improved while the operation simulation real-time performance is guaranteed.
Owner:SHENZHEN INST OF ADVANCED TECH CHINESE ACAD OF SCI

Photovoltaic power generation power prediction method based on parallel computation

The invention relates to a photovoltaic power generation power prediction method based on parallel computation. The method comprises the following steps: the three-dimensional mode library training step: a training image is constructed on the host side and stored according to the photovoltaic power generation environmental data, the data event of the training image is captured and a three-dimensional mode library is established on the client side through parallel processing; and the photovoltaic power generation power prediction step: a photovoltaic power generation prediction area is established on the host side, the unknown nodes in the wind power prediction area are traversed by using the three-dimensional mode library and the prediction result of the photovoltaic power generation poweris obtained on the client side through parallel computation. Compared with the methods in the prior art, the prediction method has the advantages of high prediction accuracy and low computational burden and high prediction speed and can be widely applied to the field of photovoltaic power generation.
Owner:SHANGHAI UNIVERSITY OF ELECTRIC POWER

Method for simulating three-dimensional light intensity distribution of thick photoresist backside oblique incidence photoetching process

InactiveCN102081311AHigh precision simulationSolve the problem that it is impossible to simulate the three-dimensional light intensity distribution of SU-8 adhesive ultraviolet light oblique incidence backside lithography processPhotomechanical exposure apparatusMicrolithography exposure apparatusLithography processUltraviolet lights
The invention relates to a method for simulating three-dimensional light intensity distribution of thick photoresist backside oblique incidence photoetching process, which solves the problem that the three-dimensional light intensity distribution of SU-8 photoresist ultraviolet light oblique incidence backside photoetching process cannot be simulated at present. By utilizing the light intensity simulation method, the three-dimensional light intensity distribution of the SU-8 photoresist interior in the SU-8 photoresist ultraviolet light oblique incidence backside photoetching process engineering can be rapidly and accurately simulated. In the method, a paraxial approximation technology with ultraviolet light oblique incidence is utilized to process Fresnel-kirchhoff diffraction integral equation based on an optical scalar diffraction theory; upper and lower limit of the Fresnel integral is translated; a three-dimensional light intensity computation model suitable for the SU-8 photoresist ultraviolet light oblique incidence backside photoetching process is deduced; and in the three-dimensional light intensity computation model of backside oblique incidence ultraviolet light, the reflection and refraction effects on the air / mask and mask / SU-8 photoresist interface in propagation process of the ultraviolet light and absorption factor on the ultraviolet light of the SU-8 photoresist are comprehensively considered; and the three-dimensional light intensity distribution of SU-8 photoresist ultraviolet light oblique incidence backside photoetching process is high precisely simulated.
Owner:SOUTHEAST UNIV
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