Step scan photo-etching machine double-platform exchanging and positioning system
A positioning system and step-scanning technology, which is applied in the direction of optomechanical equipment, microlithography exposure equipment, optics, etc., can solve the problems of increased cost, very high precision requirements, increased system manufacturing costs, etc., to reduce time-consuming, reduce Cost, the effect of effective cost control
Active Publication Date: 2006-09-06
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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Wherein, it sets one/two x-direction guide rail on pre-treating position and exposure position respectively. This invention reduces time consumption for exchange of exposure position and exposure time of every silicon slice, simplifies system, and improves system efficiency and reliability.
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