Method for measuring environment of electric charge in environmental scanning electron microscope

A technology of environmental scanning electron microscope and measurement method, which is applied in the field of measurement of charge environment in environmental scanning electron microscope, and can solve the problems of inability to measure and monitor the charge environment of sample chambers
CN1873400AInactive Publication Date: 2006-12-06BEIJING UNIV OF TECH
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
BEIJING UNIV OF TECH
Publication Date
2006-12-06
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention relates to electric charge environment measuring method used in environment scanning electron microscope. It adopts minuteness current test instrument and computer to measure sample current in metal, semiconductor, and insulator, and confirm gas pressure, gas ionization efficiency, ionization saturation, and scattering rate in ESEM sample room. This can evaluate ESEM sample room electric charge environment, optimize its imaging condition including environment and operation parameters, and study charge compensating condition and dynamic balance condition to gain high quality image.
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Description

technical field

[0001] The invention relates to a method for measuring the charge environment in an environmental scanning electron microscope. The method can measure the sample current in the Faraday cup and the sample, that is, the space charge current. Background technique

[0002] Ordinary scanning electron microscope (SEM) cannot directly observe non-conductive samples, because the high-energy incident electrons irradiated on the surface of non-conductive samples cannot be conducted away through the non-conductive ground, and the charge accumulates on the surface of the sample, resulting in charging and discharging phenomena, that is, charging effect . The charging effect will cause distortion or abnormal contrast of the scanning image, and will also bring errors to the composition analysis. Therefore, only non-conductive samples can be observed by ordinary scanning electron microscopes after conducting conductive treatment. Based on the above defects, a new type of en...

Claims

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