Method for producing controllable microhole structural piezoelectric functional film

A technology of microporous structure and functional film, applied in the manufacture/assembly of piezoelectric/electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, circuits, etc., can solve the problem of inability to prepare piezoelectric electrets , high thermal stability electret to form closed microporous structure and other problems, to achieve the effect of novel concept, high thermal stability, and improved thermal stability

Inactive Publication Date: 2007-03-21
TONGJI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, limited by its own physical and chemical properties, some highly thermally stable electrets (such as PTFE) cannot form a closed microporous structure thro

Method used

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  • Method for producing controllable microhole structural piezoelectric functional film
  • Method for producing controllable microhole structural piezoelectric functional film
  • Method for producing controllable microhole structural piezoelectric functional film

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0035] Embodiment 1 adopts a dense PTFE film (three layers) with a thickness of 25 μm and a PTFE mesh film (20 meshes, 0.08 mm wire diameter of the net, 1 mm aperture, two layers) with a thickness of 25 μm. The applied pressure is 27MPa; the applied temperature is 380°C; the applied time is 4h. A polymer composite membrane with a microporous structure is obtained. Corona charging is then performed. The corona electrode is needle-shaped; the corona voltage is 32kV; there is no grid control voltage; the charging temperature is 25°C; the charging time is 60s; the distance between the corona electrode and the sample is 7cm. 100nm aluminum electrodes were vacuum-evaporated on both sides of the microporous membrane. A piezoelectric electret film is obtained.

Embodiment 2

[0036] Embodiment 2 adopts a dense PTFE film (three layers) with a thickness of 25 μm and a FEP mesh film with a thickness of 12.5 μm (10 meshes, wire diameter of the net is 0.2 mm, aperture 0.05 mm, two layers). The applied pressure is 6kPa; the temperature is 320°C; the pressure time is 1h. A polymer composite membrane with a microporous structure is obtained. Corona charging is then performed. The corona electrode is needle-shaped; the corona voltage is 32kV; there is no grid control voltage; the charging temperature is 25°C; the charging time is 60s; the distance between the corona electrode and the sample is 7cm. 100nm aluminum electrodes were vacuum-evaporated on both sides of the microporous membrane. A piezoelectric electret film is obtained.

Embodiment 3

[0037]Embodiment 3 adopts a dense PEN film (three layers) with a thickness of 12.5 μm and a PTFE mesh film with a thickness of 12.5 μm (30 meshes, 0.1 mm wire diameter of the net, 90% porosity, two layers). The applied pressure is 15kPa; the temperature is 260°C; the pressure time is 0.5h. A polymer composite membrane with a microporous structure is obtained. Corona charging is then performed. The corona electrode is needle-shaped; the corona voltage is 32kV; there is no grid control voltage; the charging temperature is 25°C; the charging time is 60s; the distance between the corona electrode and the sample is 7cm. 100nm aluminum electrodes were vacuum-evaporated on both sides of the microporous membrane. A piezoelectric electret film is obtained.

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Abstract

This invention relates to a preparation method for controllable micro-hole structure piezoelectric function films including the preparation of the controllable micro-hole structure polymer compound film and charging to the film, which overlaps the polymer densified films with high stable heat and polymer mesh films of different smelt temperatures alternately then processes them for a period of time to get the polymer compound film to be charged by a corona method, contact method or electronic beam method to get the piezoelectric function film.

Description

technical field [0001] The invention belongs to the technical field of functional materials, and in particular relates to a preparation method of a piezoelectric functional film with a controllable microporous structure. technical background [0002] Films with closed microporous structures based on organic electret materials can exhibit outstanding piezoelectric activity after proper electrical polarization treatment. This material has the characteristics of both piezoelectric materials and electrets, and is named piezoelectric electret or ferroelectric electret. It is a new type of piezoelectric functional material developed around 1990. Piezoelectric coefficient d of piezoelectric electret 33 It is more than 20 times higher than that of ferroelectric polymer PVDF; compared with piezoelectric ceramic materials, piezoelectric electret has a higher piezoelectric coefficient d 33 In addition, it also has outstanding properties such as the flexibility of polymers, large-area...

Claims

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Application Information

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IPC IPC(8): H01L41/26H01G7/02H01L41/45
Inventor 张晓青夏钟福黄金锋王飞鹏
Owner TONGJI UNIV
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