Modularized mfg. process factory building for liquid crystal display
A liquid crystal display, modular technology, used in instruments, industrial buildings, optics, etc., to achieve the effect of increasing safety, not increasing civil construction costs, and reducing plant construction costs
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[0043] The present invention provides a process-oriented modular factory building for liquid crystal displays.
[0044] Please refer to FIG. 1 , which is an embodiment of the manufacturing process (Array) of thin film transistors used in the manufacture of liquid crystal displays in the plant, which is described as follows.
[0045] The plant 100 for manufacturing TFT-LCD liquid crystal displays, for example, implements manufacturing processes including film formation, yellowing, etching and stripping.
[0046] Among them, the film-forming process is a high-calorie production process, which requires low cleanliness (class 10000), and is easily polluted by organic substances or acidic substances in terms of purity. In other words, it is a "pollution sensitive".
[0047] The production process of yellow light is easily affected by micro-vibration and temperature / humidity (sensitive to micro-vibration and temperature / humidity), and its cleanliness is a high-precision air conditio...
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