Reflective liquid crystal display apparatus and production method thereof

a liquid crystal display and reflector technology, applied in the direction of identification means, instruments, non-linear optics, etc., can solve problems such as deterioration of switching elements, and achieve the effect of simplifying production procedures

Inactive Publication Date: 2005-03-10
NEC CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

[0037] Here, the photosensitivity may be positive type, and the step of exposure may be performed in such a manner that a smaller exposure light quantity is applied for formation of the convex / concave pattern and a greater exposure light quantity is applied for formation of the contact hole pattern. This eliminates the contact formation step, thereby simplifying the production procedure.

Problems solved by technology

In a conventional reflective LCD apparatus, protrusions are located on a metal wiring, electrode, switching element, and the like, which are exposed to a process atmosphere when forming the protrusions, causing deterioration of the switching element.

Method used

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  • Reflective liquid crystal display apparatus and production method thereof
  • Reflective liquid crystal display apparatus and production method thereof
  • Reflective liquid crystal display apparatus and production method thereof

Examples

Experimental program
Comparison scheme
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example 1

[0134]FIG. 22 and FIG. 23 show production steps for producing a reflective LCD apparatus in this example. As a switching element, a thin film transistor of forward stagger structure was used.

[0135] The production was performed by following production steps on a glass substrate. [0136] [a] formation of an ITO film with 50 nm thickness by sputtering [0137] [b] formation of a source 200 and a drain electrode 201 (using 1st photoresist) [0138] [c] use of plasma CVD to form a doping layer 202 with 100 nm thickness, a semiconductor layer 203 with 100 nm thickness, and a gate insulation film 204 with 400 nm thickness [0139] [d] formation of a Cr layer 205 with 50 nm thickness by sputtering [0140] [e] formation of a gate electrode and an island 206 of the TFT element portion (using 2nd photoresisit) [0141] [f] formation of an organic insulation film 207 (3 micrometers) [0142] [g] formation of a convex / concave pattern 208 on the upper layer of the organic insulation film (using 3rd photores...

example 2

[0159]FIG. 25 and FIG. 26 show production steps for producing a reflective LCD apparatus used in Example 2. For the switching element in this reflective LCD apparatus, a thin film transistor of inverse stagger configuration was used.

[0160] The production was performed on the glass substrate 230 through following steps. [0161] [a] formation of Cr film of 50 nm thickness by sputtering [0162] [b] formation of a gate electrode 231 (1st photoresist) [0163] [c] formation of a gate insulation film 232 of 400 nm thickness, a semiconductor layer 233 of 100 nm thickness, and a doping layer 234 of 100 nm thickness by using the CVD method [0164] [d] formation of an island 235 (2nd photoresist) [0165] [e] formation of a Cr layer and an ITO layer by sputtering [0166] [f] formation of a source electrode 236 and a drain electrode 237 (3rd photoresist) [0167] [g] formation of an organic insulation film 238 (3 micrometers) [0168] [h] formation of a convex / concave pattern 239 in the upper layer porti...

example 3

[0177] In this example, the convex / concave surface under the reflective electrode has a smooth convex / concave configuration. FIG. 28 and FIG. 29 are cross sectional views of the reflective LCD apparatus produced in this example.

[0178] This example is identical to Example 1 and Example 2 except for that an additional step is performed for converting the protrusions / indentations under the reflection electrode into a smooth shape. More specifically, a step for applying a thermal treatment is added after the step [i] in Example 1 and after the step [h] in Example 2. Accordingly, FIG. 28 is identical to FIG. 25.

[0179] In this example, the thermal treatment after the formation of the protrusions / indentations was performed in an oven under a nitrogen atmosphere at 260 degrees C. for 1 hour. By this thermal treatment, the inclination angle of the protrusions / indentations was changed from a range 60 to 80 degrees to a range 10 to 40 degrees. That is, the convex / concave shape was changed fr...

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Abstract

The present invention provides a reflective liquid crystal display (LCD) apparatus including a glass substrate 53, a transparent electrode 55 arranged on the glass substrate, a glass substrate 40, a thin film transistor (TFT) 44 arranged on the glass substrate 40, an insulation film 45 arranged on the TFT 44 and having a convex/concave structure 45a on its surface, a reflection electrode 48 arranged along the convex/concave structure 45a and connected to the TFT 44, and a liquid crystal layer 56 sandwiched between the transparent electrode 55 and the reflection electrode 48. The insulation film 48 protects the TFT transistor 44 after being formed and has the convex/concave structure 45a formed irregular arrangement of regions having different film thickness values. Thus, it is possible to prevent deterioration of the switching element during the production as well as to reduce the number of production steps.

Description

BACKGROUND OF THE INVENTION [0001] 1. Field of the Invention [0002] The present invention relates to a reflective liquid crystal display (LCD) apparatus having a reflection plate for reflecting to outside a light which has passed through a liquid crystal layer from outside. [0003] 2. Description of the Related Art [0004] As compared to a transmitting LCD apparatus, a reflective LCD apparatus can reach a reduced power consumption and a thin type with a reduced weight and accordingly, has been used mainly in a portable terminal. In the reflective LCD apparatus, light incident from outside is reflected by a reflection plate in the apparatus so as to be utilized as a display light source, thereby eliminating need of back light. [0005] The conventional reflective LCD apparatus has a basic configuration composed of a liquid crystal of the TN (twisted nematic) type, a single deflection plate type, STN (super twisted nematic) type, GH (guest-host) type, PDLC (high molecule dispersion) type,...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): G02F1/1333G09F9/30G02F1/1335G02F1/136G02F1/1368G09F9/00
CPCG02F1/133504G02F1/133553G02F1/133555G02F2203/02G02F2001/133557G02F2001/13685G02F1/136227G02F1/133557G02F1/13685G02F1/1335
Inventor KANOU, HIROSHIYAMAGUCHI, YUICHIKIKKAWA, HIRONORI
Owner NEC CORP
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