Method for assembling carbon nanotubes and microprobe and an apparatus thereof
a carbon nanotube and microprobe technology, applied in the direction of fluid pressure measurement, liquid/fluent solid measurement, peptides, etc., can solve the problems of increasing the difficulty of the whole process, difficulty in assembly of carbon nanotubes to microprobes, and difficulty in conventional techniques
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[0012] The invention utilizing the electrophoresis (or dielectrophoresis) effect to assembling carbon nanotubes and a microprobe under normal atmospheric temperature and pressure.
[0013] Please refer to FIG. 1, which is a schematic diagram showing an apparatus for assembling carbon nanotubes and microprobes by electrophoresis (or dielectrophoresis) effect.
[0014] As shown in FIG. 1, a silicon substrate 11 with at least one microprobe 12 (four probes 12 are provided in FIG. 1 as example) formed thereon by semiconductor processing is provided. A conductive layer 13 is formed and covers the surface of the substrate 11 and the microprobe 12. The conductive layer 13 can be made of materials such as gold, copper, aluminum and other metals or alloys, and it is preferred to form such conductive layer by electroplating or film deposition. In addition, a non-conductive layer 14 is formed and covering the conductive layer 13. Although a photoresist is selected as the non-conductive layer 14 fo...
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