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Method for assembling carbon nanotubes and microprobe and an apparatus thereof

a carbon nanotube and microprobe technology, applied in the direction of fluid pressure measurement, liquid/fluent solid measurement, peptides, etc., can solve the problems of increasing the difficulty of the whole process, difficulty in assembly of carbon nanotubes to microprobes, and difficulty in conventional techniques

Inactive Publication Date: 2005-07-14
IND TECH RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Benefits of technology

[0007] Another object of the invention is to provide an apparatus for assembling a carbon nanotube and a microprobe capable of

Problems solved by technology

However, due to the tiny diameter of the carbon nanotubes, it is difficult to assembly a carbon nanotube to a microprobe.
Such conventional techniques will have difficulties when depositing carbon nanotubes on a large-scale substrate under low temperature.
Furthermore, the catalyst is usually made of materials such as iron, nickel, or molybdenum, etc., in nanometer-sized powder which are not only expensive, but also will generate by-products like crystal or non-crystal carbides and residual catalyst during the process of carbon nanotube deposition.
Therefore, an additional purification processes will be needed and the difficulty of the whole process also increase.

Method used

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  • Method for assembling carbon nanotubes and microprobe and an apparatus thereof
  • Method for assembling carbon nanotubes and microprobe and an apparatus thereof
  • Method for assembling carbon nanotubes and microprobe and an apparatus thereof

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Embodiment Construction

[0012] The invention utilizing the electrophoresis (or dielectrophoresis) effect to assembling carbon nanotubes and a microprobe under normal atmospheric temperature and pressure.

[0013] Please refer to FIG. 1, which is a schematic diagram showing an apparatus for assembling carbon nanotubes and microprobes by electrophoresis (or dielectrophoresis) effect.

[0014] As shown in FIG. 1, a silicon substrate 11 with at least one microprobe 12 (four probes 12 are provided in FIG. 1 as example) formed thereon by semiconductor processing is provided. A conductive layer 13 is formed and covers the surface of the substrate 11 and the microprobe 12. The conductive layer 13 can be made of materials such as gold, copper, aluminum and other metals or alloys, and it is preferred to form such conductive layer by electroplating or film deposition. In addition, a non-conductive layer 14 is formed and covering the conductive layer 13. Although a photoresist is selected as the non-conductive layer 14 fo...

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Abstract

The present invention discloses a method for assembling carbon nanotubes and microprobe, which employs the Electrophoresis or Dielectrophoresis principles to drive the carbon nanotubes self-assembling the microprobe under an electric field. The method comprises the steps of: forming at least one microprobe, the microprobe being covered by a conductive layer; exposing the microprobe to a solution having carbon nanotubes spreading therein, the solution being furnished with an electrode; applying a predetermined voltage between the conductive layer and the electrode, making at least one carbon nanotube to move and attach onto the top of the microprobe.

Description

FIELD OF THE INVENTION [0001] The present invention relates to a method and an apparatus for assembling carbon nanotubes and microprobes, and more particularly, to a method and an apparatus for assembling carbon nanotubes and microprobes capable of employing the principles of Electrophoresis / Dielectrophoresis to drive the carbon nanotubes self-assembling the microprobe under an electric field. BACKGROUND OF THE INVENTION [0002] Carbon nanotubes are single-layered / multilayered tubular carbon molecules that have properties that make them potentially useful in nanotechnology. They exhibit unusual strength and unique electrical properties, and are extremely efficient conductors of heat A nanotube is a structure similar to a fullerene, only the carbon atoms are rolled into a cylinder instead of a sphere; each end is capped with half a fullerene molecule. They are only several nanometers wide, and their length can be millions of times greater than their width, that is, several micrometers...

Claims

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Application Information

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IPC IPC(8): C25D13/00
CPCC25D13/00B82Y30/00
Inventor SU, HUI-CHIHUANG, HSIN-CHIENLEE, YUH-WENLIN, WEI-CHINCHANG, HUI-LING
Owner IND TECH RES INST