Surface treating solution for fine processing of glass base plate having a plurality of components

a technology of surface treatment solution and glass base plate, which is applied in the direction of surface treatment composition, chemical apparatus and processes, etc., can solve the problems of local variation in etching rate and etching amount, mechanical thinning of mother glass plate, and interference with uniform etching/cleaning
US20070029519A1Inactive Publication Date: 2007-02-08KIKUYAMA HIROHISA +3
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Patent Information

Authority / Receiving Office
US · United States
Patent Type
Applications(United States)
Current Assignee / Owner
KIKUYAMA HIROHISA
Publication Date
2007-02-08
Estimated Expiration
Not applicable · inactive patent

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Abstract

A surface treatment solution for finely processing a glass substrate containing multiple ingredients is used for the construction of liquid crystal-based or organic electroluminescence-based flat panel display devices without invoking crystal precipitation and / or increasing surface roughness. An etching solution of the invention contains, in addition to hydrofluoric acid (HF) and ammonium fluoride (NH4F), at least one acid whose dissociation constant is larger than that of HF. The concentration of the acid in the solution can advantageously be adjusted to maximize the etching rate.
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Description

BACKGROUND OF THE INVENTION

[0001] 1. Field of the Invention

[0002] The present invention relates to a surface treatment solution for finely processing the surface of a glass substrate containing multiple ingredients. More specifically, the present invention relates to a surface treatment solution, useful for the fine surface processing of glass substrates, containing cation-yielding elements and their cation-yielding oxides, which is very profitably used for wet-etching / cleaning the surface of such glass substrates or etching / cleaning the surface of such glass substrates carrying finely fabricated semiconductor elements thereon during the fabrication of semiconductor devices.

[0003] 2. Related Art

[0004] In the wet processing of glass panels for flat panel display devices, pattern-etching / cleaning of glass substrates containing cation-yielding elements and their cation-yielding oxides and purification / fine-processing of pattern-etched such glass substrates using an etching solution...

Claims

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