Scanning Microscope With Shape Correction Means

a scanning microscope and shape correction technology, applied in the direction of mechanical roughness/irregularity measurement, instruments, semiconductor/solid-state device testing/measurement, etc., can solve the problems of inability difficult to increase the speed of physically scanning the sample, etc., to achieve high-speed measurement and high-precision measurement
US20080047334A1Inactive Publication Date: 2008-02-28BABA SHUICHI +3
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Patent Information

Authority / Receiving Office
US · United States
Patent Type
Applications(United States)
Current Assignee / Owner
BABA SHUICHI
Publication Date
2008-02-28
Estimated Expiration
Not applicable · inactive patent

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Abstract

A scanning probe microscope for measuring a surface shape of a sample by scanning a probe by bringing said probe close to, or into contact with, a sample surface and measuring a physical interaction occurring between the probe and the sample, includes a measurement area specific which specifies a measurement area of the sample on the basis of the image of the sample surface, and a measurement shape corrector which corrects the measurement result of the sample surface on the basis of the condition of the probe.
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Description

CROSS REFERENCE TO RELATED APPLICATION

[0001] This application is a divisional application of U.S. application Ser. No. 10 / 542,624, filed Jul. 19, 2005, which is a 371 of PCT / JP04 / 000821, filed Jan. 29, 2004, the contents of which are incorporated herein by reference. TECHNICAL FIELD

[0002] This invention relates to a scanning probe microscope technology, a sample observation method using this and a device / optical recording media production method. More particularly, the invention relates to a technology that will be effective when it is applied to specification of a measurement area and correction of the measurement result. BACKGROUND ART

[0003] A scanning probe microscope (SPM) is known as a measuring technology of fine three-dimensional shapes. This is a technology that scans a sample while a probe whose tip is pointed is controlled and contact force is kept at an extremely small value, and has widely been employed as a technology capable of measuring fine three-dimensional shape...

Claims

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