Method for treating the etching solution
a technology of etching solution and etching system, which is applied in the direction of decorative surface effects, electrical equipment, decorative arts, etc., can solve the problems of increasing the difficulty in controlling process parameters, affecting the stability of etching selectivity, and affecting the quality of etching, so as to reduce the cost of the etching process and stable etching selectivity
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[0027]FIG. 7 shows the relation between the silicon concentration and both the etching rate and silicon particle concentration in the etching solution. Curve 72 represents the etching curve of silicon nitride, curve 74 represents the etching curve of silicon oxide, and curve 76 is a variation curve of the silicon particle concentration. As shown in FIG. 7, the etching rate of silicon nitride is substantially not influenced by the silicon concentration virtually and is fixed at about 90 Å / min. In contrary, the etching rate of silicon oxide reduces as the silicon concentration increases, and is fixed at about 0.2 Å / min as the silicon concentration is above 100 ppm. When the silicon concentration is above 100 ppm, the silicon particle concentration of the etching solution increases as the silicon concentration increases.
[0028]FIG. 8 shows the relation between the silicon saturation concentration of the etching solution (i.e. the solubility of silicon in the etching solution) and the t...
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