Visual inspection apparatus, visual inspection method, and peripheral edge inspection unit that can be mounted on visual inspection apparatus.

a technology of visual inspection apparatus and peripheral edge, which is applied in the direction of measuring devices, scientific instruments, instruments, etc., can solve the problems of workpiece fracture during circuit manufacture, workpiece warpage or internal stress, and prolonged takt time, so as to reduce the time and effort of transfer, reduce the takt time of inspection, and reduce the installation area.
US20090316143A1Inactive Publication Date: 2009-12-24OLYMPUS CORP
6 Cites 12 Cited by

Patent Information

Authority / Receiving Office
US · United States
Patent Type
Applications(United States)
Current Assignee / Owner
OLYMPUS CORP
Publication Date
2009-12-24
Estimated Expiration
Not applicable · inactive patent

Smart Images

  • Figure 1
    Figure 1
  • Figure 2
    Figure 2
  • Figure 3
    Figure 3
Patent Text Reader

Abstract

This visual inspection apparatus has a macro-inspection section and a micro-inspection section. In the micro-inspection section, a inspection stage and a microscope are loaded into a loading plate. The inspection stage can be moved in any directions of the X, Y, and Z directions, and can also be rotated in the θ direction. Moreover, a peripheral edge inspection section that acquires an enlarged image of a peripheral edge of wafer W is fixed to the loading plate. The peripheral edge inspection section is arranged so as to image the peripheral edge of wafer W held by the inspection stage.
Need to check novelty before this filing date? Find Prior Art

Description

CROSS-REFERENCE TO RELATED APPLICATION

[0001] The present application is a Continuation Application of U.S. application Ser. No. 11 / 977,880 filed Oct. 26, 2007, which is incorporated herein by reference and which is a Continuation of International Application No. PCT / JP2006308759 filed Apr. 26, 2006.BACKGROUND OF THE INVENTION

[0002] 1. Field of the Invention

[0003] The present invention relates to a visual inspection apparatus used to inspect the appearance of a workpiece, a visual inspection method, and a peripheral edge inspection unit that can be mounted on such a visual inspection apparatus and used to inspect the peripheral edge of the workpiece.

[0004] 2. Description of Related Art

[0005] When patterns, such as circuits, on a workpiece, such as a semiconductor wafer, are formed, a visual inspection apparatus that inspects the existence of a defect on the surface of the workpiece is used. As this type of visual inspection apparatus, there is an inspection apparatus (for example, refer t...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More