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Organic thin film transistor and method for producing same

Active Publication Date: 2015-07-02
OSAKA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

This patent describes a new method for creating organic thin film transistors (OTFTs) that have improved performance in low voltage regions. By using separate main and auxiliary gate electrodes, the resistance of the organic semiconductor is reduced, allowing the transistor to operate at higher frequencies. Additionally, the method includes a separate step to form the lower gate insulating film, which makes it easy to create a structure where the main and auxiliary gate electrodes are separated from each other. Overall, this method improves the performance and reliability of OTFTs and allows them to be driven at high frequencies.

Problems solved by technology

However, the operation frequency of the current organic TFT is not yet sufficiently high compared with that of an inorganic TFT, and an enhancement of the operation frequency is desired.
However, it has been pointed out that the contact layer causes parasitic resistance between the source and drain electrodes and the organic semiconductor layer.

Method used

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  • Organic thin film transistor and method for producing same
  • Organic thin film transistor and method for producing same
  • Organic thin film transistor and method for producing same

Examples

Experimental program
Comparison scheme
Effect test

embodiment 1

[0042]FIG. 1 is a cross-sectional view illustrating the structure of an organic TFT according to Embodiment 1. A main gate electrode 2 is provided on an insulating substrate 1, and a lower insulating film 3a is formed so as to cover the main gate electrode 2. Auxiliary gate electrodes 4 are formed on the upper surface of the lower insulating film 3a, and an upper insulating film 3b is formed so as to cover the upper surfaces of the auxiliary gate electrodes 4. A gate insulating film 3 is constituted by the lower insulating film 3a and the upper insulating film 3b. This configuration makes it possible to achieve a state in which the main gate electrode 2 and the auxiliary gate electrodes 4 are disposed in the gate insulating film 3 so as to be electrically separated from each other. An organic semiconductor film 5 is formed on the upper surface of the upper insulating film 3b covering the auxiliary gate electrodes 4, and a source electrode 6 and a drain electrode 7 are provided so as...

embodiment 2

[0076]FIG. 7 is a cross-sectional view illustrating the structure of an organic TFT according to Embodiment 2. The element structure thereof is the same as that of Embodiment 1, except that a positional relationship between the main gate electrode 2 and the auxiliary gate electrodes 4 in the direction of the thickness of the elements is different from that of Embodiment 1. Accordingly, the components identical to those of Embodiment 1 are denoted with the identical reference numerals and descriptions thereof are simplified.

[0077]The auxiliary gate electrodes 4 are first disposed on the insulating substrate 1, and the lower insulating film 3a is formed so as to cover the auxiliary gate electrodes 4. The main gate electrode 2 is formed on the upper surface of the lower insulating film 3a, and the upper insulating film 3b is formed so as to cover the upper surface of the main gate electrode 2. This configuration makes it possible to achieve a state in which the main gate electrode 2 an...

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Abstract

An organic thin film transistor includes an insulating substrate (1), gate electrodes (2, 4), a gate insulating film (3), an organic semiconductor film (5), and a source electrode (6) and a drain electrode (7). The gate electrodes include a main gate electrode (2) that is disposed in a region opposed to a channel region between the source electrode and the drain electrode in the organic semiconductor film, and a pair of auxiliary gate electrodes (4) that are disposed in respective regions opposed to the source electrode and the drain electrode on the two sides of the main gate electrode. The main gate electrode and the auxiliary gate electrodes are electrically separated from each other. The contact resistance between the source and drain electrodes and the organic semiconductor film is controlled so as to be at a low level even when the organic thin film transistor is driven in a low voltage region, and the operation frequency can be sufficiently enhanced due to the channel length being shortened.

Description

TECHNICAL FIELD[0001]The present invention relates to an organic thin film transistor using an organic semiconductor in an active layer. In particular, the present invention relates to an organic thin film transistor having an element structure that is suitable for shortening a channel length to enhance an operation frequency, and a method for producing the same.BACKGROUND ART [0002]An organic semiconductor thin film can be formed by application of a solution. Therefore, an organic thin film transistor (organic TFT) is less expensive and has lower environmental loads than a conventional TFT using an inorganic semiconductor, and an electronic element having a large area can be produced using the organic thin film transistor. Furthermore, an organic device using the organic TFT is light in weight and flexible, and thus can be used widely in various devices such as a display and an IC tag.[0003]However, the operation frequency of the current organic TFT is not yet sufficiently high com...

Claims

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Application Information

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IPC IPC(8): H01L51/05H01L51/00H01L51/10
CPCH01L51/0545H01L51/0021H01L51/105H01L51/0554H10K71/60H10K10/482H10K10/466H10K10/84
Inventor TAKEYA, JUNICHIUEMURA, TAKAFUMI
Owner OSAKA UNIV