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Ice nucleii counter technology

a technology of ice nucleii and counters, which is applied in the direction of nanoparticle analysis, instruments, and investigating moving fluids/granular solids, etc., can solve the problems of semiconductor device manufacturing industry, significant limitations and shortcomings of existing technology in this field, and large particle size distribution and concentration problems

Inactive Publication Date: 2016-08-18
FLUID MEASUREMENT TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The present invention is providing analysis methods and apparatus that are reliable, accurate, efficient, and considered an improvement over existing technologies. The invention is about detecting colloid particles using an Ice Nuclei Counter (INC) with a temporally or spatially varying detection threshold diameter. The minimum nucleated particle size can be adjusted by adjusting the degree of supercooling which is temporally varied by adjusting the temperatures of the chilled flow cell. Additionally, the degree of supercooling can be spatially varied where the colloid is exposed to an increasing degree of supercooling. The invention is believed to involve novel elements and methods that yield more predictable results.

Problems solved by technology

Existing technology in this field is believed to have significant limitations and shortcomings.
Small particles are a major problem for the semiconductor device manufacturing industry.
Particles smaller than 50 nm can significantly reduce manufacturing yield of present day semiconductor devices.

Method used

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Embodiment Construction

[0023]The present invention provides a system and method for determining the number concentration and size distribution of particles within a dilute colloid. This is achieved by detecting the formation of ice crystals in a supercooled suspension liquid. In this description, “ice” is used as a general reference to the solid phase of any liquid and is not limited to water. For high purity liquids which are free of large particles, the temperature at which a liquid changes to the solid phase may occur at a lower value than otherwise observed for a standard ‘bulk’ liquid (referred to as supercooling). This is because the thermodynamic barrier for a liquid-solid phase transition at the bulk freezing point is not energetically favorable without the presence of nucleation sites. Particles within a liquid may serve as suitable nucleation sites and the formation of ice within a supercooled liquid provides evidence of a particle within that liquid. The temperature Tn, at which a particle with...

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Abstract

A method and system of measuring the size distribution of particles within dilute colloids, for example, through variation of the minimum ice-nucleation sizes of particles within the colloid. The system for measuring particles in fluids includes, a sample fluid inlet and an ice nuclei counter communicatively connected to the sample fluid inlet, the ice nuclei counter cooling the sample fluid and measuring particles which form crystals in the cooled fluid. The method for measuring particles in fluid includes the steps of providing a sample fluid, cooling the sample fluid, and measuring particles which form crystals in the cooled fluid.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS, IF ANY[0001]This application claims the benefit under 35 U.S.C. §19(c) of co-pending U.S. Provisional Patent Application Ser. No. 62 / 110,683, filed Feb. 2, 2015, which is hereby incorporated by reference.37 C.F.R. §1.71(e) AUTHORIZATION[0002]A portion of the disclosure of this patent document contains material which is subject to copyright protection. The copyright owner has no objection to the facsimile reproduction by anyone of the patent document or the patent disclosure, as it appears in the US Patent and Trademark Office patent file or records, but otherwise reserves all copyright rights whatsoever.STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT[0003]Not applicable.REFERENCE TO A MICROFICHE APPENDIX, IF ANY[0004]Not applicable.BACKGROUND[0005]1. Field[0006]The present invention relates, generally, to systems, apparatus and methods for analyzing material. More particularly, the invention relates to methods and apparatus fo...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): G01N15/02G01N21/49G01N33/18G01N15/06G01N1/42
CPCG01N15/0205G01N15/06G01N2015/0693G01N33/18G01N21/49G01N1/42G01N15/02G01N15/0227G01N15/0656G01N2015/0681G01N2015/1486G01N15/1433G01N15/075G01N2015/0038G01N1/40G01N2021/8405G01N2015/1493G01N2015/0053G01N15/00G01N1/4022G01N21/85G01N2015/1024G01N2015/1029
Inventor OBERREIT, DEREK
Owner FLUID MEASUREMENT TECH
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