Acid generators and photoresists comprising same
a technology of acid generators and photoresists, applied in the field of new photoresist compositions, can solve the problems that euv photoresist development remains a challenging issue in euvl technology implementation, and achieve the effects of reducing non-complexed base concentration, faster photospeed, and higher contras
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Benefits of technology
Problems solved by technology
Method used
Image
Examples
example 1
on of Camphorsulfonate Silver Salt
[0084]
[0085]Silver oxide (2.74 g, 11.8 mmol) was added to a solution of camphorsulfonic acid (5.00 g, 21.5 mmol), in acetonitrile (50 mL), stirred at r.t. overnight, filtered and concentrated to afford the title compound (7.00 g, 95%) as a white solid. 1H NMR (300 MHz, (CD3)2SO) δ: 2.94 (d, J=14.6 Hz, 1H), 2.60-2.72 (m, 1H), 2.43 (d, J=14.6 Hz, 1H), 2.25 (dt, J=14.6, 3.6 Hz, 1H), 1.96 (t, J=4.5 Hz, 1H), 1.76-1.91 (m, 2H), 1.25-1.37 (m, 2H), 1.06 (s, 3H), 0.76 (s, 3H).
example 2
on of 3-Hydroxyadamantanecarboxylic Acid Silver Salt
[0086]
Silver oxide (5.79 g, 49.8 mmol) was added to a solution of 3-hydroxyadamantanecarboxylic acid (10.0 g, 51 mmol) in acetone (250 mL) and water (250 mL) and stirred at r.t. overnight. The precipitate was filtered, washed with 1:1 acetone:water (3×250 mL), MTBE (3×200 mL) and dried to afford the title compound (13.2 g, 86%) as an off white sold. 1H NMR (300 MHz, (CD3)2SO) δ: 4.36 (s, 1H), 2.50-2.54 (m, 2H), 1.20-1.78 (m, 12H).
example 3
on of 5-(4-(2-(1-ethylcyclopentyloxy)-2-oxoethoxy)-3,5-dimethylphenyl)-5H-dibenzo[b,d]thiophenium camphorsulfonate
[0087]
Camphorsulfonate silver salt (2.84 g, 8.34 mmol) in methanol (50 mL) and water (5 mL) was added to a solution of 5-(4-(2-(1-ethylcyclopentyloxy)-2-oxoethoxy)-3,5-dimethylphenyl)-5H-dibenzo[b,d]thiophenium bromide in methanol (100 mL) and stirred at r.t. overnight. The reaction mixture was filtered, concentrated, diluted with dichloromethane (200 mL) and washed with water (3×200 mL) and concentrated to afford the title compound (4.4 g, 76%) as a white solid. 1H NMR (300 MHz, (CD3)2C0) δ: 8.87-8.55 (m, 4H), 7.96 (dt, J=7.5, 0.5 Hz, 2H), 7.74 (dt, J=7.5, 0.5 Hz, 2H), 7.59 (s, 2H), 4.53 (s, 2H), 3.13 (d, J=15.5 Hz, 1H), 3.00.3.09 (m, 1H), 2.61 (d, J=15 Hz, 1H), 2.28 (s, 6), 1.90-2.12 (m, 7H), 1.76 (d, J=15 Hz, 1H), 1.55-1.72 (m, 6H), 1.35-1.43 (m, 1H), 1.23-1.33 (m, 1H), 1.22 (s, 3H), 1.12 (s, 3H), 0.84 (t, J=7.5 Hz, 3H).
PUM
| Property | Measurement | Unit |
|---|---|---|
| wavelength | aaaaa | aaaaa |
| wavelength | aaaaa | aaaaa |
| weight percent | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
Login to View More