Self-aware and correcting heterogenous platform incorporating integrated semiconductor processing modules and method for using same

Abstract

This disclosure relates to a high volume manufacturing system for processing and measuring workpieces in a semiconductor processing sequence without leaving the system's controlled environment (e.g., sub-atmospheric pressure). The systems process chambers are connected to each other via transfer chambers used to move the workpieces, in the controlled environment, between the process chambers. The transfer chambers include a measurement module capable of measuring workpiece attributes before and / or after process treatments. The measurement module may include an inspection system mounted above, below, or inside the transfer chamber.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS[0001]The present application claims the benefit of U.S. Provisional Application No. 62 / 645,685, filed on Mar. 20, 2018, entitled “Substrate Processing Tool with Integrated Metrology and Method of Using,” U.S. Provisional Application No. 62 / 787,607, filed on Jan. 2, 2019, entitled “Self-Aware and Correcting Heterogeneous Platform incorporating Integrated Semiconductor Processing Modules and Method for using same,” U.S. Provisional Application No. 62 / 787,608, filed on Jan. 2, 2019, entitled “Self-Aware and Correcting Heterogeneous Platform incorporating Integrated Semiconductor Processing Modules and Method for using same,” and U.S. Provisional Application No. 62 / 788,195, filed on Jan. 4, 2019, entitled “Substrate Processing Tool with Integrated Metrology and Method of using,” which are incorporated herein by reference in its entirety.FIELD OF THE INVENTION[0002]The present invention relates to substrate processing, and more particularly, to an ...

AI Technical Summary

Benefits of technology

This approach enhances yield and productivity by maintaining substrates in a controlled environment, reducing contamination and breakage, and enabling early detection of process deviations, thus optimizing process control and reducing costs.

Problems solved by technology

For example, as smaller circuits such as transistors are manufactured, the critical dimension (CD) or resolution of patterned features is becoming more challenging to produce.

However, it has become extremely difficult to produce scaled devices at reasonably low cost.

However, such resources do not contribute to throughput and production, and as a result, are purely costs for the fabricators.

Furthermore, when a process goes out of specification, and the features of the substrate are not properly fabricated, it may be necessary to remove the substrate from production.

This also introduces uncertainty in any measurements where the substrate has to be brought out of a vacuum or other controlled environment and then introduced into the metrology kiosk.

Accordingly, fabricators may not be certain that they are measuring the parameters that they believe they are measuring.

As such, with smaller feature sizes in three-dimensional devices / architectures, current monitoring technologies and measurement and metrology processes are inadequate.

As a result, there can often be a lag in time between a particular process going out of specification and the recognition of that fact.

This further detrimentally affects yield.

An additional drawback with current fabrication protocols is the need for constant removal of substrates from platforms, such as systems with deposition modules, and the transport to other platforms, such as systems with etch modules or some other processing modules.

Since fabrication involves large sequences of various deposition and etch and other processing steps, the need to remove substrates from a system, transport, re-introduce into another system, reapply vacuum or some other controlled environment introduces further time and cost into the process.

The intermediary measurement or metrology processes only exacerbate the time and cost for fabrication.

The constant removal from controlled environments as well as the transport further introduces incidences of substrate breakage and contamination as well.

Still further, as may be appreciated, the numerous systems and platforms involved for the deposition steps, etch steps and other processing steps, as well as separate measurement / metrology systems, creates a significant hardware footprint within clean room environments where real estate or floor space is already expensive and at a premium.

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