Broadband infrared spectral surface spectroscopy

a spectral surface and infrared technology, applied in the field of surface spectroscopy, can solve the problems of small subsequent work on limited application, and inability to achieve the development of second harmonic generation, and achieve the effects of small change in optical signal, easy classification and association, and slow creation of spectrum

Inactive Publication Date: 2005-04-19
THE BOEING CO
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Benefits of technology

[0016]The characterization of surface conditions, especially at low levels of surface contamination, has a great deal of significance for many technical applications. As is evident from the historical study of physical chemistry, resonant spectral responses in the infrared provide the most exact information detailing of the materials being examined. This is because excitations at those wavelengths correspond to vibrational excitations in molecules, which are easy to classify and associate with specific internal molecular motions. In the present incarnation, the use of second order nonlinear optics makes the process surface specific, so that small changes in surface properties lead to a large change in the optical signal. If infrared spectroscopic features need to be examined, one of the inputs will be a tunable IR source. Since high peak powers are generally necessary to perform nonlinear optical measurements, the IR source will typically be an optical parametric oscillator designed to operate in the infrared. Heretofore, in this field, the infrared source has been operated at a narrow bandwidth, so that the infrared input has been tuned and the spectrum was slowly created. Using a broadband infrared input produces a broadband sum-frequency output containing all the features associated with the infrared response. At that point, the spectrum can be analyzed. Since the spectrum is generated all at once, the data acquisition speed in increased.

Problems solved by technology

However, because lasers at the time were comparatively feeble, impractical, slow, etc., there was little subsequent work done on the development of second harmonic generation or, more generally, second order nonlinear optical (NLO) processes at surfaces until considerably later.
However, the technique involves only linear optical processes.
However, the technique involves only linear optical processes and senses only phase changes.

Method used

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  • Broadband infrared spectral surface spectroscopy
  • Broadband infrared spectral surface spectroscopy

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Embodiment Construction

[0019]Referring now to the drawings and the characters of reference marked thereon, FIG. 1 illustrates a preferred embodiment of the nonlinear optical system of the present invention, designated generally as 10. Diagnostic system 10 includes a first optical source, indicated by phantom lines 12 for providing a narrow frequency bandwidth visible pulse that is directable to a location 13 on a surface 14 of the semiconductor wafer to be interrogated. A second optical source 16 provides a broadband infrared pulse that is also directable to the location 13 on the surface 14 to be interrogated. The optical sources 12, 16 are aligned so that their surface areas of optical illumination overlap on the interrogated surface 14. This alignment may be implemented via a series of refractive and reflective elements. For example, by changing their tilt in two axes, two mirrors in series can propagate a laser beam to any position on a surface.

[0020]The first optical source 12 includes a narrow frequ...

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Abstract

The system has a single pulse spectrum capability for sensing the presence of contamination on a surface to be interrogated. The system includes a narrow frequency bandwidth visible pulse and broadband infrared pulse that are directed to the surface. An output wavelength discriminator receives the reflected sum-frequency that is generated. The output wavelength discriminator is substantially non-transmissive at the frequencies of the visible pulse and the infrared pulse, but is substantially transmissive at the sum-frequency of the visible pulse and the infrared pulse. The output of the wavelength discriminator is a broadband output. A frequency disperser receives the output of the wavelength discriminator and provides a physical separation of output wavelengths of the broadband output. A multi-channel analyzer analyzes the intensity of the physically separated output wavelengths as a function of their physical positions. Thus, a wavelength dependent intensity measurement is provided that is indicative of the presence of contamination.

Description

BACKGROUND OF THE INVENTION[0001]1. Field of the Invention[0002]The present invention relates to surface spectroscopy and more particularly to the use of second-order nonlinear optics to provide a means to rapidly generate wavelength dependent intensity measurements indicative of the physical spectroscopic properties of a surface, including the presence of contamination.[0003]2. Description of the Related Art[0004]In nonlinear optics, outputs are produced at sum, difference or harmonic frequencies of the input(s). Using second order nonlinear optical surface spectroscopy to examine the physical properties and behavior of a surface or interface was originally proposed in the 1960's, in “Light Waves at the Boundary of Nonlinear Media” by Bloembergen and P. S. Pershan, The Physical Review, 128, Page 193 (1962). Experimental work involving second harmonic generation was also performed. However, because lasers at the time were comparatively feeble, impractical, slow, etc., there was litt...

Claims

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Application Information

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Patent Type & Authority Patents(United States)
IPC IPC(8): G01J11/00G01N21/88G01N21/95G01N21/94
CPCG01J11/00G01N21/9501G01N21/94
Inventor HUNT, JEFFREY H.
Owner THE BOEING CO
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