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System for eliminating static

A technology to eliminate static electricity and static eliminators, applied in the direction of static electricity, circuits, electrical components, etc., can solve the problems of increased energy consumption of CDA, increase of rod-shaped static eliminators, and increased costs, so as to reduce the size of installation space and reduce the use of CDA Quantity, the effect of eliminating surface static electricity

Active Publication Date: 2008-05-21
AU OPTRONICS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, increasing the number of rod-shaped static eliminators will not only increase the cost, but also affect the configuration and application of the space on the cassette storage area
In addition, the increase in the amount of CDA will not only increase energy consumption, but also cause difficulties in controlling the humidity of the clean room temperature

Method used

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  • System for eliminating static
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Examples

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Embodiment Construction

[0040] figure 2 It is a schematic diagram of the system device for eliminating static electricity proposed by the first preferred embodiment of the present invention. Such as figure 2 As shown, the static elimination system 10 includes a mechanical arm 12, and the front end of the mechanical arm 12 has a gripper (fork) 14 for picking and placing the glass substrate 13, and the static eliminator 16 is mounted on the On the mechanical arm 12. Wherein, the static eliminator 16 used in this preferred embodiment can be various types of static eliminator equipment such as rod type, fan type, high frequency type, and light irradiation type, and the clamping jaw 14 also includes a plurality of supporting arms (arm) 15, used to support the glass substrate 13. The connecting rod group 18 connected to the static eliminator 16 has two pivot points 20, and the connecting rod group 18 is controlled by the first servo motor 22 and the second servo motor 24 on the pivot point 20 to drive...

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Abstract

This invention relates to a system for eliminating static including a manipulator arm, a nip claw set at the front of the arm, a connecting rod group set on the arm and a static eliminator set on the connecting rod set moving to-and-fro in a definite sphere by the connecting rod set to eliminate static.

Description

technical field [0001] The present invention relates to a system for eliminating static electricity, especially a system for eliminating static electricity on the surface of a large-sized glass substrate in combination with a static eliminator and a mechanical arm. Background technique [0002] With the trend and demand for light, thin, high-resolution, and low-radiation products, flat-panel displays such as plasma display panels (PDP), liquid crystal display panels (LCD), and organic light-emitting panels (OLED) are increasingly favored by consumers. To obtain good manufacturing quality and yield rate, each manufacturing process is very important. [0003] Taking the manufacturing process of thin-film transistor liquid crystal display (TFT-LCD) as an example, since the surface of the glass substrate is transported between various manufacturing processes, static electricity is often generated due to contact or friction. Even a small amount of static electricity will also cau...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/677H01L21/00H05F3/00B65G47/90B65G49/06
Inventor 刘家彰陈庆育赵启仲
Owner AU OPTRONICS CORP
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